JPH01174385U - - Google Patents
Info
- Publication number
- JPH01174385U JPH01174385U JP7200788U JP7200788U JPH01174385U JP H01174385 U JPH01174385 U JP H01174385U JP 7200788 U JP7200788 U JP 7200788U JP 7200788 U JP7200788 U JP 7200788U JP H01174385 U JPH01174385 U JP H01174385U
- Authority
- JP
- Japan
- Prior art keywords
- suction plate
- exhaust path
- exhaust
- vacuum suction
- rmax
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000919 ceramic Substances 0.000 claims 1
- 230000003746 surface roughness Effects 0.000 claims 1
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- Sheets, Magazines, And Separation Thereof (AREA)
- Load-Engaging Elements For Cranes (AREA)
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7200788U JPH0738305Y2 (ja) | 1988-05-31 | 1988-05-31 | 真空吸着プレート |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7200788U JPH0738305Y2 (ja) | 1988-05-31 | 1988-05-31 | 真空吸着プレート |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01174385U true JPH01174385U (xx) | 1989-12-12 |
| JPH0738305Y2 JPH0738305Y2 (ja) | 1995-08-30 |
Family
ID=31297185
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7200788U Expired - Lifetime JPH0738305Y2 (ja) | 1988-05-31 | 1988-05-31 | 真空吸着プレート |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0738305Y2 (xx) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0522429U (ja) * | 1991-08-31 | 1993-03-23 | 山形日本電気株式会社 | ベローズ形ウエーハ真空チヤツク |
| JP2022074028A (ja) * | 2020-10-30 | 2022-05-17 | セメス カンパニー，リミテッド | 搬送ハンド及び基板処理装置 |
-
1988
- 1988-05-31 JP JP7200788U patent/JPH0738305Y2/ja not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0522429U (ja) * | 1991-08-31 | 1993-03-23 | 山形日本電気株式会社 | ベローズ形ウエーハ真空チヤツク |
| JP2022074028A (ja) * | 2020-10-30 | 2022-05-17 | セメス カンパニー，リミテッド | 搬送ハンド及び基板処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0738305Y2 (ja) | 1995-08-30 |