JPH01173744U - - Google Patents
Info
- Publication number
- JPH01173744U JPH01173744U JP1988070544U JP7054488U JPH01173744U JP H01173744 U JPH01173744 U JP H01173744U JP 1988070544 U JP1988070544 U JP 1988070544U JP 7054488 U JP7054488 U JP 7054488U JP H01173744 U JPH01173744 U JP H01173744U
- Authority
- JP
- Japan
- Prior art keywords
- support frame
- pellicle
- adhesive
- flexible sheet
- attached
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000853 adhesive Substances 0.000 claims description 4
- 230000001070 adhesive effect Effects 0.000 claims description 4
Landscapes
- Packaging Frangible Articles (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988070544U JPH0624839Y2 (ja) | 1988-05-28 | 1988-05-28 | ペリクル収納容器 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988070544U JPH0624839Y2 (ja) | 1988-05-28 | 1988-05-28 | ペリクル収納容器 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01173744U true JPH01173744U (sk) | 1989-12-11 |
JPH0624839Y2 JPH0624839Y2 (ja) | 1994-06-29 |
Family
ID=31295780
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1988070544U Expired - Lifetime JPH0624839Y2 (ja) | 1988-05-28 | 1988-05-28 | ペリクル収納容器 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0624839Y2 (sk) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007334069A (ja) * | 2006-06-16 | 2007-12-27 | Asahi Kasei Electronics Co Ltd | ペリクル収納容器 |
JP2013145328A (ja) * | 2012-01-16 | 2013-07-25 | Shin Etsu Chem Co Ltd | ペリクル収納容器及びペリクル保管方法 |
-
1988
- 1988-05-28 JP JP1988070544U patent/JPH0624839Y2/ja not_active Expired - Lifetime
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007334069A (ja) * | 2006-06-16 | 2007-12-27 | Asahi Kasei Electronics Co Ltd | ペリクル収納容器 |
JP2013145328A (ja) * | 2012-01-16 | 2013-07-25 | Shin Etsu Chem Co Ltd | ペリクル収納容器及びペリクル保管方法 |
Also Published As
Publication number | Publication date |
---|---|
JPH0624839Y2 (ja) | 1994-06-29 |