JPH01173493U - - Google Patents
Info
- Publication number
- JPH01173493U JPH01173493U JP6686188U JP6686188U JPH01173493U JP H01173493 U JPH01173493 U JP H01173493U JP 6686188 U JP6686188 U JP 6686188U JP 6686188 U JP6686188 U JP 6686188U JP H01173493 U JPH01173493 U JP H01173493U
- Authority
- JP
- Japan
- Prior art keywords
- rotor
- bearing housing
- movable
- vertical direction
- outer periphery
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007789 sealing Methods 0.000 claims 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6686188U JPH0643518Y2 (ja) | 1988-05-23 | 1988-05-23 | 分子ポンプのシール装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6686188U JPH0643518Y2 (ja) | 1988-05-23 | 1988-05-23 | 分子ポンプのシール装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01173493U true JPH01173493U (uk) | 1989-12-08 |
| JPH0643518Y2 JPH0643518Y2 (ja) | 1994-11-14 |
Family
ID=31292249
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6686188U Expired - Lifetime JPH0643518Y2 (ja) | 1988-05-23 | 1988-05-23 | 分子ポンプのシール装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0643518Y2 (uk) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014190343A (ja) * | 2013-03-27 | 2014-10-06 | Oerlikon Leybold Vacuum Gmbh | 真空ポンプ |
-
1988
- 1988-05-23 JP JP6686188U patent/JPH0643518Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014190343A (ja) * | 2013-03-27 | 2014-10-06 | Oerlikon Leybold Vacuum Gmbh | 真空ポンプ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0643518Y2 (ja) | 1994-11-14 |