JPH01173493U - - Google Patents

Info

Publication number
JPH01173493U
JPH01173493U JP6686188U JP6686188U JPH01173493U JP H01173493 U JPH01173493 U JP H01173493U JP 6686188 U JP6686188 U JP 6686188U JP 6686188 U JP6686188 U JP 6686188U JP H01173493 U JPH01173493 U JP H01173493U
Authority
JP
Japan
Prior art keywords
rotor
bearing housing
movable
vertical direction
outer periphery
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6686188U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0643518Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6686188U priority Critical patent/JPH0643518Y2/ja
Publication of JPH01173493U publication Critical patent/JPH01173493U/ja
Application granted granted Critical
Publication of JPH0643518Y2 publication Critical patent/JPH0643518Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
JP6686188U 1988-05-23 1988-05-23 分子ポンプのシール装置 Expired - Lifetime JPH0643518Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6686188U JPH0643518Y2 (ja) 1988-05-23 1988-05-23 分子ポンプのシール装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6686188U JPH0643518Y2 (ja) 1988-05-23 1988-05-23 分子ポンプのシール装置

Publications (2)

Publication Number Publication Date
JPH01173493U true JPH01173493U (el) 1989-12-08
JPH0643518Y2 JPH0643518Y2 (ja) 1994-11-14

Family

ID=31292249

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6686188U Expired - Lifetime JPH0643518Y2 (ja) 1988-05-23 1988-05-23 分子ポンプのシール装置

Country Status (1)

Country Link
JP (1) JPH0643518Y2 (el)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014190343A (ja) * 2013-03-27 2014-10-06 Oerlikon Leybold Vacuum Gmbh 真空ポンプ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014190343A (ja) * 2013-03-27 2014-10-06 Oerlikon Leybold Vacuum Gmbh 真空ポンプ

Also Published As

Publication number Publication date
JPH0643518Y2 (ja) 1994-11-14

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