JPH01171586U - - Google Patents

Info

Publication number
JPH01171586U
JPH01171586U JP6405988U JP6405988U JPH01171586U JP H01171586 U JPH01171586 U JP H01171586U JP 6405988 U JP6405988 U JP 6405988U JP 6405988 U JP6405988 U JP 6405988U JP H01171586 U JPH01171586 U JP H01171586U
Authority
JP
Japan
Prior art keywords
coil
magnet
linear motor
magnetic field
moves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6405988U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0721107Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988064059U priority Critical patent/JPH0721107Y2/ja
Publication of JPH01171586U publication Critical patent/JPH01171586U/ja
Application granted granted Critical
Publication of JPH0721107Y2 publication Critical patent/JPH0721107Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Linear Motors (AREA)
JP1988064059U 1988-05-17 1988-05-17 リニアモータ Expired - Lifetime JPH0721107Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988064059U JPH0721107Y2 (ja) 1988-05-17 1988-05-17 リニアモータ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988064059U JPH0721107Y2 (ja) 1988-05-17 1988-05-17 リニアモータ

Publications (2)

Publication Number Publication Date
JPH01171586U true JPH01171586U (US07534539-20090519-C00280.png) 1989-12-05
JPH0721107Y2 JPH0721107Y2 (ja) 1995-05-15

Family

ID=31289542

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988064059U Expired - Lifetime JPH0721107Y2 (ja) 1988-05-17 1988-05-17 リニアモータ

Country Status (1)

Country Link
JP (1) JPH0721107Y2 (US07534539-20090519-C00280.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010154596A (ja) * 2008-12-24 2010-07-08 Nikon Corp リニアモータ、ステージ装置及び露光装置並びにデバイスの製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS535402A (en) * 1976-07-06 1978-01-19 Ebara Corp Eddy engenderment preventive equipment of pumping water tank

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS535402A (en) * 1976-07-06 1978-01-19 Ebara Corp Eddy engenderment preventive equipment of pumping water tank

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010154596A (ja) * 2008-12-24 2010-07-08 Nikon Corp リニアモータ、ステージ装置及び露光装置並びにデバイスの製造方法

Also Published As

Publication number Publication date
JPH0721107Y2 (ja) 1995-05-15

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