JPH01170439U - - Google Patents
Info
- Publication number
- JPH01170439U JPH01170439U JP6641588U JP6641588U JPH01170439U JP H01170439 U JPH01170439 U JP H01170439U JP 6641588 U JP6641588 U JP 6641588U JP 6641588 U JP6641588 U JP 6641588U JP H01170439 U JPH01170439 U JP H01170439U
- Authority
- JP
- Japan
- Prior art keywords
- raw material
- gas
- gas supply
- flow rate
- detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002994 raw material Substances 0.000 claims description 25
- 238000010438 heat treatment Methods 0.000 claims description 6
- 239000007788 liquid Substances 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Glass Melting And Manufacturing (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Description
第１図及び第２図は本考案に係る原料ガス供給
装置の第１、第２実施例の系統図、第３図は従来
の原料ガス供給装置の系統図である。
１……原料タンク、２……原料液、３……加熱
手段、４……上部空間、５……ガス供給流路、１
１……流量（圧力）検出器、１２……流量制御器
、１３……流量（圧力）設定器、１４……温度検
出器。
1 and 2 are system diagrams of first and second embodiments of the raw material gas supply device according to the present invention, and FIG. 3 is a system diagram of a conventional raw material gas supply device. DESCRIPTION OF SYMBOLS 1... Raw material tank, 2... Raw material liquid, 3... Heating means, 4... Upper space, 5... Gas supply channel, 1
1...Flow rate (pressure) detector, 12...Flow rate controller, 13...Flow rate (pressure) setting device, 14...Temperature detector.
補正 平１．１．３０
実用新案登録請求の範囲を次のように補正する
。Amendment 1.30.1.30 The scope of claims for utility model registration is amended as follows.
【実用新案登録請求の範囲】
原料液を収容する原料タンクと、前記原料タン
ク内の前記原料液を加熱して原料ガスを得る加熱
手段と、得られた前記原料ガスの蒸気圧により該
原料ガスを供給相手側へ導くガス供給流路とを備
えた原料ガス供給装置において、前記ガス供給流
路にその中を流れる前記原料ガスの流量又はガス
圧を検出する流量検出器又はガス圧検出器が設け
られ、前記流量検出器又は前記ガス圧検出器から
の信号により前記ガス供給流路を流れる前記原料
ガスの流量又はガス圧が所望の値となるように前
記加熱手段の温度を制御する温度制御器が設けら
れていることを特徴とする原料ガス供給装置。
図面の簡単な説明を次のように補正する。
明細書第９頁第１８行の「（圧力）検出器、」
を「（ガス圧）検出器、」に訂正する。[Claims for Utility Model Registration] A raw material tank containing a raw material liquid; a heating means for heating the raw material liquid in the raw material tank to obtain a raw material gas; In a raw material gas supply device equipped with a gas supply channel that guides the raw material gas to a supply partner side, a flow rate detector or a gas pressure detector that detects the flow rate or gas pressure of the raw material gas flowing therein in the gas supply channel. is provided, and the temperature of the heating means is controlled so that the flow rate or gas pressure of the raw material gas flowing through the gas supply channel becomes a desired value based on a signal from the flow rate detector or the gas pressure detector. A raw material gas supply device characterized by being provided with a controller. The brief description of the drawing has been amended as follows. "(Pressure) detector" on page 9, line 18 of the specification
should be corrected to "(gas pressure) detector,"
Claims (1)
ク内の前記原料液を加熱して原料ガスを得る加熱
手段と、得られた前記原料ガスの蒸気圧により該
原料ガスを供給相手側へ導くガス供給流路とを備
えた原料ガス供給装置において、前記ガス供給流
路にその中を流れる前記原料ガスの流量又はガス
圧を検出する流量検出器はガス圧検出器が設けら
れ、前記流量検出器又は前記ガス検出器からの信
号により前記ガス供給流路を流れる前記原料ガス
の流量又はガス圧が所望の値となるように前記加
熱手段の温度を制御する温度制御器が設けられて
いることを特徴とする原料ガス供給装置。 A raw material tank that stores a raw material liquid, a heating means that heats the raw material liquid in the raw material tank to obtain a raw material gas, and a gas supply that guides the raw material gas to a supply partner using the vapor pressure of the obtained raw material gas. In the raw material gas supply device equipped with a flow path, a flow rate detector for detecting the flow rate or gas pressure of the raw material gas flowing therein is provided in the gas supply flow path, and a gas pressure detector is provided in the gas supply flow path, and the flow rate detector or A temperature controller is provided that controls the temperature of the heating means so that the flow rate or gas pressure of the raw material gas flowing through the gas supply channel reaches a desired value based on a signal from the gas detector. Raw material gas supply equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988066415U JPH0522256Y2 (en) | 1988-05-20 | 1988-05-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988066415U JPH0522256Y2 (en) | 1988-05-20 | 1988-05-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01170439U true JPH01170439U (en) | 1989-12-01 |
| JPH0522256Y2 JPH0522256Y2 (en) | 1993-06-08 |
Family
ID=31291822
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988066415U Expired - Lifetime JPH0522256Y2 (en) | 1988-05-20 | 1988-05-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0522256Y2 (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49128999U (en) * | 1973-03-08 | 1974-11-06 |
-
1988
- 1988-05-20 JP JP1988066415U patent/JPH0522256Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49128999U (en) * | 1973-03-08 | 1974-11-06 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0522256Y2 (en) | 1993-06-08 |
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