JPS648728U - - Google Patents
Info
- Publication number
- JPS648728U JPS648728U JP10364587U JP10364587U JPS648728U JP S648728 U JPS648728 U JP S648728U JP 10364587 U JP10364587 U JP 10364587U JP 10364587 U JP10364587 U JP 10364587U JP S648728 U JPS648728 U JP S648728U
- Authority
- JP
- Japan
- Prior art keywords
- heater
- temperature
- core tube
- furnace core
- gas flow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 4
- 230000020169 heat generation Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Description
第１図は本考案の熱処理装置の一実施例におけ
る全体構成図、第２図は従来の熱処理装置の全体
構成図を示している。
（符号の説明）、１……炉芯管、５……ガス供
給口、６……炉体、７ａ，７ｂ，７ｃ……ヒータ
、８ａ，８ｂ，８ｃ……温度検出器、９……温度
制御部、１０……ヒータ制御部、１１……ガス流
量計。
FIG. 1 shows an overall configuration diagram of an embodiment of the heat treatment apparatus of the present invention, and FIG. 2 shows an overall configuration diagram of a conventional heat treatment apparatus. (Explanation of symbols), 1...Furnace tube, 5...Gas supply port, 6...Furnace body, 7a, 7b, 7c...Heater, 8a, 8b, 8c...Temperature detector, 9...Temperature Control unit, 10... Heater control unit, 11... Gas flow meter.
Claims (1)
、処理用ガスをガス流量計を経て該炉芯管のガス
供給口より供給すると共に、上記ヒータ内に温度
検出器を設置し、上記炉芯管内の温度が設定温度
となるようにヒータ内の温度を検出し予め設定さ
れた温度と温度制御部で比較し、ヒータ制御部で
上記ヒータの発熱量を制御して炉芯管内の温度を
制御する熱処理装置において、 上記温度制御部に上記ガス流量計から検出され
る流量変化信号を供給し、ガス流量変化に対して
もヒータ制御部を介してヒータの発熱量を制御す
るようにしたことを特徴とする熱処理装置。[Scope of Claim for Utility Model Registration] A furnace core tube is inserted into a furnace body equipped with a heater, and processing gas is supplied from the gas supply port of the furnace core tube through a gas flow meter, and temperature is controlled within the heater. A detector is installed to detect the temperature inside the heater so that the temperature inside the furnace core tube is the set temperature, and the temperature controller compares it with the preset temperature, and the heater controller controls the amount of heat generated by the heater. In a heat treatment apparatus that controls the temperature inside the furnace core tube, a flow rate change signal detected from the gas flow meter is supplied to the temperature control section, and heat generation of the heater is controlled via the heater control section even in response to a change in gas flow rate. A heat treatment apparatus characterized in that the amount is controlled.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10364587U JPS648728U (en) | 1987-07-06 | 1987-07-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10364587U JPS648728U (en) | 1987-07-06 | 1987-07-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS648728U true JPS648728U (en) | 1989-01-18 |
Family
ID=31334666
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10364587U Pending JPS648728U (en) | 1987-07-06 | 1987-07-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS648728U (en) |
-
1987
- 1987-07-06 JP JP10364587U patent/JPS648728U/ja active Pending