JPH02142469U - - Google Patents
Info
- Publication number
- JPH02142469U JPH02142469U JP5140189U JP5140189U JPH02142469U JP H02142469 U JPH02142469 U JP H02142469U JP 5140189 U JP5140189 U JP 5140189U JP 5140189 U JP5140189 U JP 5140189U JP H02142469 U JPH02142469 U JP H02142469U
- Authority
- JP
- Japan
- Prior art keywords
- heating element
- melt
- single crystal
- vapor pressure
- always used
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 11
- 239000013078 crystal Substances 0.000 claims description 4
- 150000001875 compounds Chemical class 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000000155 melt Substances 0.000 claims 3
- 230000005611 electricity Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000003708 ampul Substances 0.000 description 1
- 229910021478 group 5 element Inorganic materials 0.000 description 1
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Description
第１図は本考案による化合物半導体単結晶製造
装置の一実施例を示す構成図、第２図は本考案に
係る蒸気圧制御炉の発熱体を切替え制御するバツ
クアツプ用の制御手段を含む制御系の一例を示す
回路図である。
１……常時使用する発熱体、２……予備発熱体
、２１……反応管としてのアンプル、１０，１１
……通電切替装置、１２……断線検出器、２２…
…ボート、２３……融液、２５……Ｖ族元素、３
０……蒸気圧制御炉、４０……制御手段である。
FIG. 1 is a block diagram showing an embodiment of a compound semiconductor single crystal manufacturing apparatus according to the present invention, and FIG. 2 is a control system including backup control means for switching and controlling heating elements of a vapor pressure controlled reactor according to the present invention. It is a circuit diagram showing an example. 1... Heating element for constant use, 2... Preliminary heating element, 21... Ampoule as a reaction tube, 10, 11
... Energization switching device, 12 ... Disconnection detector, 22 ...
... Boat, 23 ... Melt, 25 ... Group V element, 3
0... Steam pressure controlled furnace, 40... Control means.
Claims (1)
の蒸気圧を一定に保持するための族元素とを収
容した反応管に対し、融液保持温度および蒸気圧
温度をボートの長さ方向に与える二種類の加熱炉
を相対的に移動することによつて、ボートの一端
から融液を凝固させて融液全体を単結晶化する化
合物半導体単結晶製造装置において、 上記蒸気圧温度を与える加熱炉の発熱体に、常
時使用する発熱体の外に予備発熱体を設け、 常時使用する発熱体の断線を検知したとき常時
使用する発熱体から予備発熱体に通電を切り替え
る制御手段を設けた ことをと特徴とする化合物半導体単結晶製造装
置。[Scope of Claim for Utility Model Registration] - Regarding the reaction tube containing the boat containing the melt of the group element and the group element for maintaining the vapor pressure in the reaction tube constant, the melt holding temperature and vapor pressure temperature In a compound semiconductor single crystal production device that solidifies the melt from one end of the boat and turns the entire melt into a single crystal by relatively moving two types of heating furnaces that provide A preliminary heating element is installed in the heating element of the heating furnace that provides the above vapor pressure temperature in addition to the heating element that is always used, and when a disconnection of the heating element that is always used is detected, electricity is passed from the heating element that is always used to the preliminary heating element. 1. A compound semiconductor single crystal manufacturing apparatus characterized by being provided with a control means for switching.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5140189U JPH02142469U (en) | 1989-04-28 | 1989-04-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5140189U JPH02142469U (en) | 1989-04-28 | 1989-04-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02142469U true JPH02142469U (en) | 1990-12-03 |
Family
ID=31570814
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5140189U Pending JPH02142469U (en) | 1989-04-28 | 1989-04-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02142469U (en) |
-
1989
- 1989-04-28 JP JP5140189U patent/JPH02142469U/ja active Pending
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