JPH01169959A - Manufacture of clad belt for ic lead frame - Google Patents
Manufacture of clad belt for ic lead frameInfo
- Publication number
- JPH01169959A JPH01169959A JP32812687A JP32812687A JPH01169959A JP H01169959 A JPH01169959 A JP H01169959A JP 32812687 A JP32812687 A JP 32812687A JP 32812687 A JP32812687 A JP 32812687A JP H01169959 A JPH01169959 A JP H01169959A
- Authority
- JP
- Japan
- Prior art keywords
- rolling
- base metal
- clad
- cladding
- metal belt
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 6
- 238000005096 rolling process Methods 0.000 claims abstract description 31
- 239000010953 base metal Substances 0.000 claims abstract description 14
- 238000005498 polishing Methods 0.000 claims abstract description 13
- 238000000034 method Methods 0.000 claims abstract description 8
- 229910000679 solder Inorganic materials 0.000 abstract description 9
- 230000003746 surface roughness Effects 0.000 abstract description 9
- 230000003647 oxidation Effects 0.000 abstract description 5
- 238000007254 oxidation reaction Methods 0.000 abstract description 5
- 238000005253 cladding Methods 0.000 description 26
- 239000000463 material Substances 0.000 description 13
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 238000000137 annealing Methods 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 229910003271 Ni-Fe Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 238000004040 coloring Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005496 eutectics Effects 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 239000002241 glass-ceramic Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、半導体集積回路(I C)のリードフレーム
に用いられるクラッド帯の製造方法に関するものである
。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method of manufacturing a cladding band used in a lead frame of a semiconductor integrated circuit (IC).
ICリードフレームとして用いられるクラッド材の代表
例としては、42%Ni−Fe合金(母材)+A1箔(
被着材)があり、ガラスセラミックパッケージ(サーデ
イプ)に使われている。A typical example of cladding material used as an IC lead frame is 42% Ni-Fe alloy (base material) + A1 foil (
It is used in glass-ceramic packages (Sardip).
クラッド材の製造においては、従来例えば特開昭57−
121265号に開示されるように、クラッドに先立っ
て母材金属帯表面にワイヤーブラシ研磨を行なうことが
一般的に行なわれている。In the production of cladding materials, conventionally, for example, Japanese Patent Application Laid-Open No. 57-
As disclosed in No. 121265, wire brush polishing is generally performed on the surface of the base metal strip prior to cladding.
ワイヤーブラシ研磨の効果は、金属表面の清浄化・活性
化の目的とともに、特開昭62−72489号に開示さ
れるように金属表面に硬化層を形成して圧延時の亀裂発
生に伴う新生面の出現を促す効果もあると言われている
。The effect of wire brush polishing is not only to clean and activate the metal surface, but also to form a hardened layer on the metal surface as disclosed in JP-A No. 62-72489, and to prevent new surfaces from forming when cracks occur during rolling. It is said that it also has the effect of encouraging the appearance of the fruit.
ところが、上記のワイヤーブラシ研磨は、クラッド部に
のみ精度良く処理せしめることが困難であり、クラッド
部以外の母材にほぼ全面にわたり研磨が施される。そし
て、この研磨によるワイヤー痕跡は、クラッド圧延およ
びそれに続く仕上圧延でも完全には消滅せず、最終製品
にまで持ち越されていた。この結果、ワイヤーブラシ研
磨を行なった面と、非研磨面の表面性状が異質となるた
め、ICパッケージ実装時の加熱工程で素材上下面の着
色の度合い、すなわち酸化膜の厚さがアンバランスとな
る問題があり、母材金属帯の両面の表面性状が同一のク
ラッド材が求められていた。However, in the wire brush polishing described above, it is difficult to treat only the cladding portion with high precision, and polishing is performed over almost the entire surface of the base material other than the cladding portion. The wire traces caused by this polishing were not completely eliminated by clad rolling and subsequent finish rolling, and were carried over into the final product. As a result, the surface properties of the wire brush polished surface and the unpolished surface are different, resulting in an imbalance in the degree of coloring on the upper and lower surfaces of the material, that is, the thickness of the oxide film, during the heating process during IC package mounting. There is a need for a cladding material that has the same surface properties on both sides of the base metal strip.
両面の表面性状を同一にする手段としては、非クラッド
面にもクラッド面と同様にワイヤーブラシ研磨を施す方
法も考えられるが、この方法では。As a means to make the surface properties of both surfaces the same, it is also possible to perform wire brush polishing on the non-clad surface in the same manner as on the clad surface, but this method does not work.
工程増を招くだけでなくワイヤーブラシ研磨を受けた面
がミクロ的には不均質で厚い酸化膜を形成しているため
、非研磨面に比べてはんだ濡れ性が劣化し易いという問
題があった。さらに、ワイヤーの線径が過度に大きい場
合には、曲げ折れの起点となることも想定される。In addition to increasing the number of steps, the wire-brush polished surface is microscopically non-uniform and forms a thick oxide film, which causes solder wettability to deteriorate more easily than non-polished surfaces. . Furthermore, if the diameter of the wire is excessively large, it may become a starting point for bending and breaking.
本発明の目的は、ワイヤーブラシ研磨による不均質な表
面を改善し、しかも母材金属帯の両面の表面性状が同一
であるICリードフレーム用クラッド帯の製造方法を提
供するものである。An object of the present invention is to provide a method for manufacturing a cladding band for an IC lead frame, which improves the non-uniform surface caused by wire brush polishing and has the same surface properties on both sides of the base metal band.
〔問題点を解決するための手段〕
本発明は、母材金属帯表面をワイヤーブラシ研磨したの
ち、クラッド圧延およびそれに続く仕上圧延を行なう工
程の中で少なくとも1回ダル肌ロールを用いて圧延する
ことを特徴とするICリードフレーム用クラッド帯の製
造方法である。[Means for Solving the Problems] The present invention involves wire-brush polishing the surface of the base metal strip, and then rolling it using a dull roll at least once during the steps of clad rolling and subsequent finish rolling. This is a method of manufacturing a cladding band for an IC lead frame.
本発明において、母材金属帯の表面にワイヤーブラシ研
磨を施したのち、クラッド圧延およびそれに続く仕上圧
延を行なう工程の中で少なくとも1回ダル肌ロールを用
いるのは、ワイヤーブラシ研磨の影響を完全に消去する
と共に両面同一の表面性状を得るためである。In the present invention, after wire brush polishing the surface of the base metal strip, a dull skin roll is used at least once during the clad rolling and the subsequent finish rolling to completely eliminate the effects of wire brush polishing. This is to erase the scratches and to obtain the same surface texture on both sides.
本発明において、ダル肌ロールとは、表面粗さがRa
O,10μm以上のロールを言う。ただし、表面粗さを
粗くし過ぎるとクラッドした金属条の表面荒れの問題や
、母材金属帯が酸化され易くなるなどの弊害が出るため
、Raは0.25μm以下にすることが好ましい。なお
、とのダル肌ロールは、クラッド以降の圧延工程で少な
くとも1回使用すれば良い、したがって、クラッドロー
ルとして用いることも、それに続く仕上圧延で用いるこ
とも可能である。また、工程によっては途中で軟化焼鈍
、拡散焼鈍などの熱処理工程を入れても構わなし1゜〔
実施例〕
以下1本発明による実施例を示す。In the present invention, a dull skin roll has a surface roughness of Ra
O, refers to rolls of 10 μm or more. However, if the surface roughness is made too rough, problems such as surface roughness of the clad metal strip and easy oxidation of the base metal strip occur, so Ra is preferably set to 0.25 μm or less. Note that the dull skin roll may be used at least once in the rolling process after cladding, so it can be used as a clad roll or in the subsequent finish rolling. Also, depending on the process, a heat treatment process such as softening annealing or diffusion annealing may be added during the process.
Examples] Below, one example according to the present invention will be shown.
(実施例1)
母材金属としてFe−42%Ni合金の帯(0,32m
+++X35、Oan幅)を被着材として、純アルミニ
ウムの条(10μ■厚X 10.Own幅)を用いた。(Example 1) A strip of Fe-42%Ni alloy (0.32 m
+++X35, Oan width) was used as the adherend, and a pure aluminum strip (10μ thick x 10.Own width) was used.
まず、クラッド前処理として母材金属上のクラッド側の
面をワイヤーブラシで研磨した後、アルミニウム条を重
ね、表面粗さがRa = 0.20μmのダル肌ロール
を用いてクラッド圧延を行ない、0.254mm厚のク
ラッド帯を得た(第1表No、1)。First, as a cladding pretreatment, the cladding side surface of the base metal was polished with a wire brush, and then aluminum strips were stacked and cladding rolling was performed using a dull skin roll with a surface roughness of Ra = 0.20 μm. A cladding band with a thickness of .254 mm was obtained (No. 1 in Table 1).
(実施例2)
実施例1と同一の素材を用い、同様に母材のクラッド側
面をワイヤーブラシ研磨したのち、アルミニウム条を重
ね、表面粗さがRa=0.05μmのブライト肌ロール
でクラッド圧延を行ない、続いて表面粗さがRa=0.
20μmのダル肌ロールで仕上圧延を行なって0.25
4nm厚のクラッド帯を得た(第1表No、2)。(Example 2) Using the same material as in Example 1, the cladding side surface of the base material was polished with a wire brush in the same manner, and then aluminum strips were stacked and the cladding was rolled using a bright skin roll with a surface roughness of Ra = 0.05 μm. Then, the surface roughness is Ra=0.
Finish rolling with a 20μm dull roll to give a roll of 0.25
A 4 nm thick cladding band was obtained (Table 1 No. 2).
(実施例3)
実施例1と同一の素材を用い、同様に母材のクラッド側
面をワイヤーブラシ研磨したのち、アルミニウム条を重
ね、表面粗さがRa=0.05μmのブライト肌ロール
でクラッド圧延を行ない、続し1で表面粗さがRa=0
.20μmのダル肌ロールで仕上圧延(1)を行ない、
さらに最後にRa=0.05μmのブライト肌ロールで
仕上圧延(2)を施して0.254mm厚のクラッド帯
を得た(第1表N o 、 3 )。(Example 3) Using the same material as in Example 1, the cladding side surface of the base material was polished with a wire brush in the same manner, and then aluminum strips were stacked and the cladding was rolled using a bright skin roll with a surface roughness of Ra = 0.05 μm. Then, in step 1, the surface roughness is Ra=0.
.. Finish rolling (1) is performed with a 20 μm dull roll,
Finally, finish rolling (2) was performed using a bright skin roll with Ra=0.05 μm to obtain a 0.254 mm thick cladding band (Table 1, No, 3).
なお、比較例として、実施例と同様に母材のクラッド側
面のみをワイヤーブラシ研磨したのち、Ra=0.05
μ諺のブライト肌ロールのみを用いてクラッド圧延、仕
上圧延を行なったもの(第1表No、4)と、母材両面
にワイヤーブラシ研磨を行なったのち、Ra==0.0
5μmのブライト肌ロールのみを用いてクラッド圧延、
仕上圧延(1)、仕上圧延(2)を行なったもの(第1
表No、5)を示した。As a comparative example, only the clad side surface of the base material was polished with a wire brush in the same manner as in the example, and then Ra = 0.05.
Ra = = 0.0 after clad rolling and finish rolling using only the μ proverbial bright skin roll (No. 4 in Table 1) and wire brush polishing on both sides of the base material.
Cladding rolling using only 5μm bright skin rolls,
Finish rolling (1), finished rolling (2) (first
Table No. 5) is shown.
各々、得られたクラッド帯は、530℃×5分の大気加
熱に処し、母材金属帯両面のはんだ濡れ性を評価した。Each of the obtained clad bands was subjected to atmospheric heating at 530°C for 5 minutes, and the solder wettability of both sides of the base metal band was evaluated.
またははんだ濡れ性に塩素系フラックスで表面を処理後
、240℃に加熱した共晶はんだ浴に5秒間浸漬して濡
れ性を評価し、評価面の951以上の濡れ面積を示した
ものを良と判定した。Or, after treating the surface with chlorine-based flux for solder wettability, evaluate the wettability by immersing it in a eutectic solder bath heated to 240°C for 5 seconds, and those showing a wetted area of 951 or more on the evaluated surface are considered good. I judged it.
第1表に結果を示す。第1表から明らかなように5本発
明により得られたクラッド帯は、いずれも良好なはんだ
濡れ性を示すことがわかる。これに対して、比較例によ
るNo、4は、ワイヤーブラシ研磨面がはんだ濡れ不良
をおこす。また、No。Table 1 shows the results. As is clear from Table 1, all five cladding bands obtained according to the present invention exhibit good solder wettability. On the other hand, in Comparative Example No. 4, the wire brush polished surface caused poor solder wetting. Also, no.
5ははんだ濡れ性が劣化している。No. 5 has deteriorated solder wettability.
また、クラッド帯の表裏面を観察すると、本発明に係る
クラッド帯の酸化膜は、表裏同一膜質であり、かつ均一
な膜となっているのに対し、比較例No、4は表裏面の
酸化膜が異質であるとともに、ワイヤーブラシ研磨面に
おいては、酸化膜厚が本発明に比べ厚くかつ不均一であ
った。Furthermore, when observing the front and back surfaces of the cladding band, the oxide film of the cladding band according to the present invention has the same film quality on the front and back sides and is a uniform film, whereas Comparative Example No. 4 has oxidation on the front and back surfaces. The film was heterogeneous, and the oxide film thickness on the wire brush polished surface was thicker and non-uniform than that of the present invention.
さらに、比較例No、5は表裏面同質ではあるが、No
、4のワイヤーブラシ研磨面と同様に膜厚が厚く、不均
一な酸化膜であった。Furthermore, although Comparative Examples No. 5 and 5 have the same quality on the front and back surfaces, No.
Similar to the wire brush polished surface of No. 4, the oxide film was thick and non-uniform.
本発明によれば、従来問題とされていたクラッド材表面
の酸化量のバラツキやはんだ濡れ性が改善でき、品質の
よいクラッド帯が得られる。According to the present invention, it is possible to improve the variation in the amount of oxidation on the surface of the cladding material and the solder wettability, which have been problems in the past, and to obtain a cladding band of good quality.
Claims (1)
ッド圧延およびそれに続く仕上圧延を行なう工程の中で
少なくとも1回はダル肌ロールを用いて圧延することを
特徴とするICリードフレーム用クラッド帯の製造方法
。Manufacture of a clad strip for an IC lead frame, characterized in that after wire brush polishing the surface of the base metal strip, rolling is performed using a dull roll at least once during the steps of clad rolling and subsequent finish rolling. Method.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP32812687A JPH01169959A (en) | 1987-12-24 | 1987-12-24 | Manufacture of clad belt for ic lead frame |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP32812687A JPH01169959A (en) | 1987-12-24 | 1987-12-24 | Manufacture of clad belt for ic lead frame |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01169959A true JPH01169959A (en) | 1989-07-05 |
Family
ID=18206777
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP32812687A Pending JPH01169959A (en) | 1987-12-24 | 1987-12-24 | Manufacture of clad belt for ic lead frame |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01169959A (en) |
-
1987
- 1987-12-24 JP JP32812687A patent/JPH01169959A/en active Pending
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