JPH01168551U - - Google Patents
Info
- Publication number
- JPH01168551U JPH01168551U JP6330988U JP6330988U JPH01168551U JP H01168551 U JPH01168551 U JP H01168551U JP 6330988 U JP6330988 U JP 6330988U JP 6330988 U JP6330988 U JP 6330988U JP H01168551 U JPH01168551 U JP H01168551U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- sputtering
- film
- target material
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 7
- 238000004544 sputter deposition Methods 0.000 claims description 5
- 239000013077 target material Substances 0.000 claims description 2
- 238000000151 deposition Methods 0.000 claims 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6330988U JPH01168551U (xx) | 1988-05-16 | 1988-05-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6330988U JPH01168551U (xx) | 1988-05-16 | 1988-05-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01168551U true JPH01168551U (xx) | 1989-11-28 |
Family
ID=31288817
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6330988U Pending JPH01168551U (xx) | 1988-05-16 | 1988-05-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01168551U (xx) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007111097A1 (ja) * | 2006-03-27 | 2007-10-04 | Shinmaywa Industries, Ltd. | 基材保持装置 |
| WO2008108018A1 (ja) * | 2007-03-07 | 2008-09-12 | Shinmaywa Industries, Ltd. | 基板保持装置、ターゲット保持装置、及び真空成膜装置 |
| JP2008307197A (ja) * | 2007-06-14 | 2008-12-25 | Nippon Pachinko Buhin Kk | 遊技機 |
-
1988
- 1988-05-16 JP JP6330988U patent/JPH01168551U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007111097A1 (ja) * | 2006-03-27 | 2007-10-04 | Shinmaywa Industries, Ltd. | 基材保持装置 |
| JP2007262445A (ja) * | 2006-03-27 | 2007-10-11 | Shin Meiwa Ind Co Ltd | 基材保持装置 |
| WO2008108018A1 (ja) * | 2007-03-07 | 2008-09-12 | Shinmaywa Industries, Ltd. | 基板保持装置、ターゲット保持装置、及び真空成膜装置 |
| JP2008307197A (ja) * | 2007-06-14 | 2008-12-25 | Nippon Pachinko Buhin Kk | 遊技機 |