JPH01167378U - - Google Patents

Info

Publication number
JPH01167378U
JPH01167378U JP6432688U JP6432688U JPH01167378U JP H01167378 U JPH01167378 U JP H01167378U JP 6432688 U JP6432688 U JP 6432688U JP 6432688 U JP6432688 U JP 6432688U JP H01167378 U JPH01167378 U JP H01167378U
Authority
JP
Japan
Prior art keywords
fine movement
casing
adjustment screw
jig
preload adjustment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6432688U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0640477Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6432688U priority Critical patent/JPH0640477Y2/ja
Publication of JPH01167378U publication Critical patent/JPH01167378U/ja
Application granted granted Critical
Publication of JPH0640477Y2 publication Critical patent/JPH0640477Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
JP6432688U 1988-05-16 1988-05-16 圧電式微動アクチュエータ Expired - Lifetime JPH0640477Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6432688U JPH0640477Y2 (ja) 1988-05-16 1988-05-16 圧電式微動アクチュエータ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6432688U JPH0640477Y2 (ja) 1988-05-16 1988-05-16 圧電式微動アクチュエータ

Publications (2)

Publication Number Publication Date
JPH01167378U true JPH01167378U (cs) 1989-11-24
JPH0640477Y2 JPH0640477Y2 (ja) 1994-10-19

Family

ID=31289797

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6432688U Expired - Lifetime JPH0640477Y2 (ja) 1988-05-16 1988-05-16 圧電式微動アクチュエータ

Country Status (1)

Country Link
JP (1) JPH0640477Y2 (cs)

Also Published As

Publication number Publication date
JPH0640477Y2 (ja) 1994-10-19

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