JPH01167378U - - Google Patents
Info
- Publication number
- JPH01167378U JPH01167378U JP6432688U JP6432688U JPH01167378U JP H01167378 U JPH01167378 U JP H01167378U JP 6432688 U JP6432688 U JP 6432688U JP 6432688 U JP6432688 U JP 6432688U JP H01167378 U JPH01167378 U JP H01167378U
- Authority
- JP
- Japan
- Prior art keywords
- fine movement
- casing
- adjustment screw
- jig
- preload adjustment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000036316 preload Effects 0.000 claims description 3
Landscapes
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
Description
第１図は本考案の圧電式微動アクチユエータの
水平断面図、第２図はその垂直断面図、第３図は
その背面図である。
１……圧電式微動アクチユエータ、２……ケー
シング、３……微動ジグ、４……圧電アクチユエ
ータ素子、７……送りテーブル、８……固定部、
１１……微動部、１５……微動テーブル、１８…
…変形部、２０……予圧調整ねじ。
FIG. 1 is a horizontal sectional view of the piezoelectric fine movement actuator of the present invention, FIG. 2 is a vertical sectional view thereof, and FIG. 3 is a rear view thereof. DESCRIPTION OF SYMBOLS 1... Piezoelectric fine movement actuator, 2... Casing, 3... Fine movement jig, 4... Piezoelectric actuator element, 7... Feeding table, 8... Fixed part,
11...Fine movement section, 15...Fine movement table, 18...
...Deformed part, 20...Preload adjustment screw.
Claims (1)
の固定部でケーシングに取り付けられ、他端の微
動部でケーシングに対して移動可能な微動ジグと
、この微動ジグの中間部に形成された変形部と、
固定部にねじ込まれた予圧調整ねじと、この予圧
調整ねじと微動部との間に介在する積層型の圧電
アクチユエータ素子とからなることを特徴とする
圧電式微動アクチユエータ。 A cylindrical casing, a fine movement jig that is attached to the casing at a fixed part at one end and movable relative to the casing at a fine movement part at the other end, and a deformed part formed in the middle part of this fine movement jig. ,
A piezoelectric fine movement actuator comprising a preload adjustment screw screwed into a fixed part and a laminated piezoelectric actuator element interposed between the preload adjustment screw and a fine movement part.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6432688U JPH0640477Y2 (en) | 1988-05-16 | 1988-05-16 | Piezoelectric fine actuator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6432688U JPH0640477Y2 (en) | 1988-05-16 | 1988-05-16 | Piezoelectric fine actuator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01167378U true JPH01167378U (en) | 1989-11-24 |
| JPH0640477Y2 JPH0640477Y2 (en) | 1994-10-19 |
Family
ID=31289797
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6432688U Expired - Lifetime JPH0640477Y2 (en) | 1988-05-16 | 1988-05-16 | Piezoelectric fine actuator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0640477Y2 (en) |
-
1988
- 1988-05-16 JP JP6432688U patent/JPH0640477Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0640477Y2 (en) | 1994-10-19 |