JPH01167049U - - Google Patents
Info
- Publication number
- JPH01167049U JPH01167049U JP6222488U JP6222488U JPH01167049U JP H01167049 U JPH01167049 U JP H01167049U JP 6222488 U JP6222488 U JP 6222488U JP 6222488 U JP6222488 U JP 6222488U JP H01167049 U JPH01167049 U JP H01167049U
- Authority
- JP
- Japan
- Prior art keywords
- main
- plane
- semiconductor wafer
- wafer holder
- single crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 2
- 229910004298 SiO 2 Inorganic materials 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6222488U JPH01167049U (de) | 1988-05-13 | 1988-05-13 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6222488U JPH01167049U (de) | 1988-05-13 | 1988-05-13 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01167049U true JPH01167049U (de) | 1989-11-22 |
Family
ID=31287854
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6222488U Pending JPH01167049U (de) | 1988-05-13 | 1988-05-13 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01167049U (de) |
-
1988
- 1988-05-13 JP JP6222488U patent/JPH01167049U/ja active Pending