JPH01167049U - - Google Patents

Info

Publication number

JPH01167049U

JPH01167049U JP6222488U JP6222488U JPH01167049U JP H01167049 U JPH01167049 U JP H01167049U JP 6222488 U JP6222488 U JP 6222488U JP 6222488 U JP6222488 U JP 6222488U JP H01167049 U JPH01167049 U JP H01167049U

Authority

JP

Japan

Prior art keywords

main

plane

semiconductor wafer

wafer holder

single crystal

Prior art date

1988-05-13

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
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• 239000004065 semiconductor Substances 0.000 claims description 3
• 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 2
• 229910004298 SiO 2 Inorganic materials 0.000 claims 1
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
• 239000000853 adhesive Substances 0.000 description 1
• 230000001070 adhesive effect Effects 0.000 description 1
• 229910052681 coesite Inorganic materials 0.000 description 1
• 229910052906 cristobalite Inorganic materials 0.000 description 1
• 238000004519 manufacturing process Methods 0.000 description 1
• 239000000463 material Substances 0.000 description 1
• 238000000034 method Methods 0.000 description 1
• 239000000377 silicon dioxide Substances 0.000 description 1
• 235000012239 silicon dioxide Nutrition 0.000 description 1
• 229910052682 stishovite Inorganic materials 0.000 description 1
• 229910052905 tridymite Inorganic materials 0.000 description 1