JPH01166954U - - Google Patents
Info
- Publication number
- JPH01166954U JPH01166954U JP6309888U JP6309888U JPH01166954U JP H01166954 U JPH01166954 U JP H01166954U JP 6309888 U JP6309888 U JP 6309888U JP 6309888 U JP6309888 U JP 6309888U JP H01166954 U JPH01166954 U JP H01166954U
- Authority
- JP
- Japan
- Prior art keywords
- electron
- electron beam
- electron gun
- beam sweep
- gun device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010894 electron beam technology Methods 0.000 claims description 6
- 239000000919 ceramic Substances 0.000 claims description 2
- 238000004804 winding Methods 0.000 claims description 2
- 239000004020 conductor Substances 0.000 claims 1
- 238000001704 evaporation Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 238000010408 sweeping Methods 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6309888U JPH062202Y2 (ja) | 1988-05-13 | 1988-05-13 | 電子銃装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6309888U JPH062202Y2 (ja) | 1988-05-13 | 1988-05-13 | 電子銃装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01166954U true JPH01166954U (enExample) | 1989-11-22 |
| JPH062202Y2 JPH062202Y2 (ja) | 1994-01-19 |
Family
ID=31288627
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6309888U Expired - Lifetime JPH062202Y2 (ja) | 1988-05-13 | 1988-05-13 | 電子銃装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH062202Y2 (enExample) |
-
1988
- 1988-05-13 JP JP6309888U patent/JPH062202Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH062202Y2 (ja) | 1994-01-19 |
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