JPH01165166U

JPH01165166U -

Info

Publication number: JPH01165166U
Application number: JP5782788U
Authority: JP
Priority date: 1988-04-29
Filing date: 1988-04-29
Publication date: 1989-11-17

Description

[Brief explanation of the drawing]

第１図はこの考案の一実施例を示す平面図、第
２図は同じく側断面図、第３図は第１図の―
線による拡大断面図、第４図は第３図の真空引き
作動状態を示した拡大断面図、第５図および第６
図はこの考案の別の実施例についてのそれぞれ第
３図および第４図に対応した拡大断面図、第７図
は従来技術を示す簡略側面図である。１……被加工板、２……台板、２１……上面、
３，８……吸着ノズル、４，９……ノズル孔、５
……戻しばね、８２……薄肉撓曲部。 Fig. 1 is a plan view showing one embodiment of this invention, Fig. 2 is a side sectional view of the same, and Fig. 3 is the same as Fig. 1.
4 is an enlarged sectional view showing the vacuuming operation state of FIG. 3, and FIGS. 5 and 6 are
The figures are enlarged sectional views corresponding to FIGS. 3 and 4, respectively, of another embodiment of this invention, and FIG. 7 is a simplified side view showing the prior art. 1... Work plate, 2... Base plate, 21... Top surface,
3, 8... Suction nozzle, 4, 9... Nozzle hole, 5
...Return spring, 82...Thin bending part.

Claims

[Scope of Claim for Utility Model Registration] 1. A table with a plurality of nozzle holes provided at appropriate vertical and horizontal intervals in a range corresponding to the size of the workpiece to be processed, and whose top surface is finished with a smooth flat surface. a hollow cylindrical suction nozzle that can slide in the nozzle hole in the thickness direction of the base plate and is normally provided at a position protruding from the upper surface of the base plate due to a return spring; A flat holding base plate for a workpiece plate, the base plate having a vacuum suction device for suctioning and discharging in the direction of the lower surface of the base plate. 2. A base plate with a smooth flat top surface and a hollow cylindrical shape, in which a plurality of nozzle holes are provided at appropriate vertical and horizontal intervals in a range corresponding to the size of the workpiece plate to be processed. , a suction nozzle that can slide in the nozzle hole in the thickness direction of the base plate, has an upper end protruding from the upper surface of the base plate, and has a lower end formed as a thin flexible part; and the nozzle hole. and a vacuum suction device for sucking and discharging the air inside toward the lower surface of the base plate. 3. A suction nozzle in the shape of a hollow cylinder, with an upper end formed as a smooth sealing part and a lower end formed as a bellows-like bent part so that the height in the axial direction changes.