JPH01165008A - Production of magnetic head - Google Patents
Production of magnetic headInfo
- Publication number
- JPH01165008A JPH01165008A JP32352187A JP32352187A JPH01165008A JP H01165008 A JPH01165008 A JP H01165008A JP 32352187 A JP32352187 A JP 32352187A JP 32352187 A JP32352187 A JP 32352187A JP H01165008 A JPH01165008 A JP H01165008A
- Authority
- JP
- Japan
- Prior art keywords
- glass
- magnetic
- temperature
- fusion
- time
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 7
- 239000011521 glass Substances 0.000 claims abstract description 16
- 239000002184 metal Substances 0.000 claims abstract description 11
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 8
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 8
- 239000001301 oxygen Substances 0.000 claims abstract description 8
- 229910018125 Al-Si Inorganic materials 0.000 claims abstract 3
- 229910018520 Al—Si Inorganic materials 0.000 claims abstract 3
- 238000000034 method Methods 0.000 claims description 5
- 239000010409 thin film Substances 0.000 claims 2
- 230000004927 fusion Effects 0.000 abstract description 14
- 238000000137 annealing Methods 0.000 abstract description 6
- 230000001105 regulatory effect Effects 0.000 abstract description 2
- 238000004804 winding Methods 0.000 abstract description 2
- 239000007789 gas Substances 0.000 abstract 1
- 230000000694 effects Effects 0.000 description 4
- 229910000859 α-Fe Inorganic materials 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000002253 acid Substances 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
Landscapes
- Magnetic Heads (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は磁気記録・再生装置用の磁気ヘッドの製造方法
に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method of manufacturing a magnetic head for a magnetic recording/reproducing device.
従来のＦｅ−Ａｌ−３ｉの金属磁性膜を有する磁気ヘッ
ドは、Ｆｅ −Ａｌ−３ｉの磁性膜をスパッタ等によっ
てフェライトよりなる磁性体上に成膜した後、アニール
処理を６００℃位で行い、その後、真空中或は不活性ガ
ス中で、５００℃程度の低融点ガラスを用いて、２体の
磁性体ブロックを融着接合している。A conventional magnetic head having a metal magnetic film of Fe-Al-3i is manufactured by forming an Fe-Al-3i magnetic film on a magnetic material made of ferrite by sputtering or the like, and then annealing the film at about 600°C. Thereafter, the two magnetic blocks are fusion-bonded using low melting point glass of about 500° C. in vacuum or in an inert gas.
しかし前述の従来技術では、アニール処理と融着接合と
２度の温度プロセスを行うので、リードタイムが長くな
ってしまう。また、融着時に低融点ガラス中のＰｂ成分
等が飛散してしまい、強度的に脆くなり、融着時やその
後の加工時にガラスにクラックが発生しやすくなるとい
う問題点を有する。そこで本発明はこのような問題点を
解決するものでその目的とする所は、製造のリードタイ
ムが短く、低コストで、しかも、強度上信頼性の高い磁
気ヘッドを提供するところにある。However, in the above-mentioned conventional technology, since annealing treatment, fusion bonding, and a two-degree temperature process are performed, the lead time becomes long. Further, there is a problem in that the Pb component and the like in the low melting point glass scatters during fusion, making the glass brittle and prone to cracks during fusion and subsequent processing. SUMMARY OF THE INVENTION The present invention is intended to solve these problems, and its purpose is to provide a magnetic head with short manufacturing lead time, low cost, and high reliability in terms of strength.
本発明の磁気ヘッドの製造方法は、Ｆｅ −Ａｌ −３
ｉの金属磁性膜を成膜した面を少なくとも一面具備する
２体の磁性体ブロックを前記金属磁性膜を成膜した面を
対向させ磁気ギャップを形成しつつガラスによって融着
接合する磁気ヘッドの製造方法とにふいて、前記ガラス
の融着温度が５６０ ｔ：から６２０℃であり、融着時
の酸素濃度が５０〜３００ｐｐｍである事を特徴とする
。The method for manufacturing a magnetic head of the present invention includes Fe-Al-3
Manufacture of a magnetic head in which two magnetic blocks each having at least one surface on which a metal magnetic film is deposited are fused and joined by glass, with the surfaces on which the metal magnetic film is deposited facing each other and forming a magnetic gap. The method is characterized in that the glass has a fusing temperature of 560 to 620°C and an oxygen concentration of 50 to 300 ppm during fusing.
本発明上記の構成において、酸素濃度が３００ｐｐｍ以
上では、フェライト表面が酸化され（例えばＦｅ、０．
がＦｅ２Ｏ，、となる）磁気特性が劣下し、逆に５Ｑｐ
ｐｍ以下では酸素不足により、融着ガラス中のｐｂ酸成
分飛散し易く、強度上、信頼性上（例えば耐湿性）問題
となるので、５０〜３００ｐｐｍである必要がある。ま
た融着温度が６２０℃を越えると、Ｆｅ −Ａｌ−３ｉ
膜の結晶配列が変化し、磁気特性が劣下し始める。逆に
５６０℃以下になると、内部ひずみを十分に除去しきれ
なくなってしまうので、結果的に磁気特性が劣るので、
５６０℃〜６００℃とする必要がある。In the above configuration of the present invention, when the oxygen concentration is 300 ppm or more, the ferrite surface is oxidized (for example, Fe, 0.5 ppm or more).
becomes Fe2O, .) The magnetic properties deteriorate, and conversely, 5Qp
If it is less than pm, the pb acid component in the fused glass is likely to scatter due to lack of oxygen, causing problems in terms of strength and reliability (for example, moisture resistance), so it is necessary to be in the range of 50 to 300 ppm. Moreover, when the fusion temperature exceeds 620℃, Fe-Al-3i
The crystalline alignment of the film changes and the magnetic properties begin to deteriorate. On the other hand, if the temperature is below 560℃, the internal strain cannot be removed sufficiently, resulting in poor magnetic properties.
It is necessary to set it as 560 degreeC - 600 degreeC.
第１図は本発明の実施例における磁気ヘッドの斜視図で
ある。コイル巻線窓を有する第１のコア１とＦｅ−Ａｌ
−Ｓｉの金属磁性膜２を有する第２のコア３を磁気ギャ
ップ４を形成しつつ例えば、作業温度（粘性が１０４ポ
イズとなる温度）が６００℃の融着ガラス５を用い、例
えばＡｒやＮ２の様な不活性ガスにより炉内の雰囲気を
置換した後、所定の温度プロファイルで融着する。その
時の温度が２００℃を越える範囲では酸素濃度が５０〜
３００ｐｐｍを維持するようにする。この様にすること
によって、Ｆｅ −Ａｌ−３ｉの金属磁性膜２をスパッ
タ等によって着はり後で、アニール処理をしなくても、
アニール処理をした物と同様の効果が得られる。この時
に使用するｐ゛ラスして、融着温度が５６０℃以下の物
であると、その効果が著しく低下し、また、融着強度も
弱くなる。また、６２０℃以上の融着ガラスを使用する
と、Ｆｅ −Ａｌ−３ｉ膜の磁気特性がアニール処理し
た物に比べやはり、劣下してしまう。さらに融着時の雰
囲気として、酸素濃度が５０ｐｐｍ以下であると融着ガ
ラスの強度及び耐湿性が問題となり、また、３００ｐｐ
ｍを越えると、Ｆｅ−Ａｌ−３ｉ膜の磁気特性ばかりか
、フェライトの表面の磁気特性も劣下してしまう。この
様に、融着温度として５６０℃〜６２０℃、酸素濃度と
して５０〜３００ｐｐｍにすると、Ｆｅ−Ａｌ−３ｉ膜
の磁気特性が例えば、残留磁束密度が１万ガウス以上、
保磁力が０．３エルスラツト以下、透磁率が１５００（
４ＭＨｚの時）以上と非常に優れた値を示す。FIG. 1 is a perspective view of a magnetic head in an embodiment of the present invention. First core 1 with coil winding window and Fe-Al
A second core 3 having a metal magnetic film 2 of -Si is formed with a magnetic gap 4, and a fused glass 5 having a working temperature (the temperature at which the viscosity becomes 104 poise) is 600°C is used, for example, with Ar or N2. After replacing the atmosphere in the furnace with an inert gas such as, fusion is performed at a predetermined temperature profile. In the range where the temperature at that time exceeds 200℃, the oxygen concentration is 50~
Try to maintain 300ppm. By doing this, the metal magnetic film 2 of Fe-Al-3i can be deposited by sputtering or the like without annealing treatment.
Effects similar to those obtained by annealing can be obtained. If the glass used at this time has a fusion temperature of 560° C. or lower, its effectiveness will be significantly reduced and the fusion strength will also be weakened. Further, if a glass fused at a temperature of 620° C. or higher is used, the magnetic properties of the Fe-Al-3i film are still inferior to those of an annealed film. Furthermore, if the oxygen concentration in the atmosphere during fusion is less than 50 ppm, the strength and moisture resistance of the fused glass will become a problem;
If it exceeds m, not only the magnetic properties of the Fe-Al-3i film but also the magnetic properties of the ferrite surface deteriorate. In this way, when the fusion temperature is 560°C to 620°C and the oxygen concentration is 50 to 300ppm, the magnetic properties of the Fe-Al-3i film are such that, for example, the residual magnetic flux density is 10,000 Gauss or more.
Coercive force is 0.3 L or less, magnetic permeability is 1500 (
(at 4 MHz) or higher, which is an extremely excellent value.
以上述べた様に本発明によれば、融着温度及び融着時の
雰囲気を規定する事によって、磁気特性の優れたＦｅ−
Ａｌ−３ｉ膜が得られるとともにアニール処理をせずに
済むので、工程も短縮される。また磁気ヘッド完成体に
おいては、磁気特性の優れたしかも疑似ギャップの影響
のない磁気ヘッドが、得られるという効果を有する。As described above, according to the present invention, by regulating the fusion temperature and the atmosphere during fusion, Fe-
Since an Al-3i film can be obtained and no annealing treatment is required, the process is also shortened. In addition, the completed magnetic head has the effect that a magnetic head with excellent magnetic properties and free from the influence of pseudo gaps can be obtained.
第１図は本発明の磁気ヘッドの一実施例を示す斜視図。
１・・・第１のコア
２・・・Ｆｅ−Ａｌ−３ｉの金属磁性膜３・・・第２の
コア
４・・・磁気ギャップ
５・・・融着ガラス
以 上FIG. 1 is a perspective view showing an embodiment of the magnetic head of the present invention. 1... First core 2... Fe-Al-3i metal magnetic film 3... Second core 4... Magnetic gap 5... Fused glass or more
Claims (1)
とも一面具備する２体の磁性体ブロックを前記金属磁性
薄膜を成膜した面を対向させ磁気ギャップを形成しつつ
ガラスによって融着接合する磁気ヘッドの製造方法にお
いて、前記ガラスの融着温度が５６０℃から６２０℃で
あり、融着時の酸素濃度が５０〜３００ｐｐｍである事
を特徴とする磁気ヘッドの製造方法。Two magnetic blocks each having at least one surface on which a metal magnetic thin film of Fe-Al-Si is deposited are fused and joined by glass with the surfaces on which the metal magnetic thin film is deposited facing each other while forming a magnetic gap. A method for manufacturing a magnetic head, characterized in that the glass has a fusing temperature of 560° C. to 620° C. and an oxygen concentration of 50 to 300 ppm during fusing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32352187A JPH01165008A (en) | 1987-12-21 | 1987-12-21 | Production of magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32352187A JPH01165008A (en) | 1987-12-21 | 1987-12-21 | Production of magnetic head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01165008A true JPH01165008A (en) | 1989-06-29 |
Family
ID=18155616
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP32352187A Pending JPH01165008A (en) | 1987-12-21 | 1987-12-21 | Production of magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01165008A (en) |
-
1987
- 1987-12-21 JP JP32352187A patent/JPH01165008A/en active Pending
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