JPH01165007A - Magnetic head - Google Patents
Magnetic headInfo
- Publication number
- JPH01165007A JPH01165007A JP32312887A JP32312887A JPH01165007A JP H01165007 A JPH01165007 A JP H01165007A JP 32312887 A JP32312887 A JP 32312887A JP 32312887 A JP32312887 A JP 32312887A JP H01165007 A JPH01165007 A JP H01165007A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- gap
- thin film
- magnetic head
- core half
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000696 magnetic material Substances 0.000 claims abstract description 15
- 238000004804 winding Methods 0.000 claims abstract description 14
- 239000010409 thin film Substances 0.000 claims description 27
- 229910045601 alloy Inorganic materials 0.000 claims description 10
- 239000000956 alloy Substances 0.000 claims description 10
- 229910000808 amorphous metal alloy Inorganic materials 0.000 claims description 4
- 150000001875 compounds Chemical class 0.000 claims description 3
- 229910018125 Al-Si Inorganic materials 0.000 claims description 2
- 229910018520 Al—Si Inorganic materials 0.000 claims description 2
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 claims 1
- 239000007769 metal material Substances 0.000 claims 1
- 239000000463 material Substances 0.000 abstract description 8
- 239000011521 glass Substances 0.000 abstract description 6
- 238000010030 laminating Methods 0.000 abstract description 2
- 230000001105 regulatory effect Effects 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 13
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 229910000859 α-Fe Inorganic materials 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 4
- 239000002131 composite material Substances 0.000 description 3
- 239000006247 magnetic powder Substances 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 239000013590 bulk material Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910001004 magnetic alloy Inorganic materials 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 229910000702 sendust Inorganic materials 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910017112 Fe—C Inorganic materials 0.000 description 1
- 229910003271 Ni-Fe Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- AJCDFVKYMIUXCR-UHFFFAOYSA-N oxobarium;oxo(oxoferriooxy)iron Chemical compound [Ba]=O.O=[Fe]O[Fe]=O.O=[Fe]O[Fe]=O.O=[Fe]O[Fe]=O.O=[Fe]O[Fe]=O.O=[Fe]O[Fe]=O.O=[Fe]O[Fe]=O AJCDFVKYMIUXCR-UHFFFAOYSA-N 0.000 description 1
- 229910000889 permalloy Inorganic materials 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- KZSNJWFQEVHDMF-UHFFFAOYSA-O valinium Chemical compound CC(C)C([NH3+])C(O)=O KZSNJWFQEVHDMF-UHFFFAOYSA-O 0.000 description 1
Landscapes
- Magnetic Heads (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は高密度VTR,DAT、FD等に好適な磁気ヘ
ッドに関する。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a magnetic head suitable for high-density VTRs, DATs, FDs, etc.
従来の技術
従来、VTR用の磁気ヘッド材料としてはフェライトの
バルク磁性材料が用いられてきた。フェライトのような
バルク材料による磁気ヘッドの製造において、磁気ギヤ
ツブの形成は、上述の材料にトラック加工1巻線溝加工
等の形状加工を施したコア半体対を貼合わせて形成され
る。このためにはコア半体対のギャップ形成面を精度良
く研磨した後、所望の厚さのギャップ部材をスパック法
等により形成した後ガラス等を接着剤として加熱溶融し
て行われていた。またメタル磁性粉等の高保磁力媒体を
用いた記録再生系においては、磁気ギャップ付近に金属
磁性薄膜を形成して記録効率を高めた複合材料からなる
ヘッドも用いられているが、製造法、形状等は従来のフ
ェライトヘッドと本質的に異なるものではない。BACKGROUND OF THE INVENTION Conventionally, ferrite bulk magnetic materials have been used as magnetic head materials for VTRs. In manufacturing a magnetic head using a bulk material such as ferrite, a magnetic gear is formed by laminating a pair of core halves that have been subjected to shape processing such as track processing and first winding groove processing to the above-mentioned material. For this purpose, the gap forming surfaces of the pair of core halves are polished with high accuracy, a gap member having a desired thickness is formed by a spattering method, and then glass or the like is used as an adhesive and melted by heating. In addition, in recording and reproducing systems using high coercive force media such as metal magnetic powder, heads made of composite materials are also used that improve recording efficiency by forming a metal magnetic thin film near the magnetic gap. etc. are not essentially different from conventional ferrite heads.
近年、高密度磁気記録の進展にともない、記録密度の向
上の要求により記録媒体としてr−Fe203からメタ
ル磁性粉、バリュウムフェライト等の使用が検討されて
いる。磁気ヘッドに対しては記録媒体の変化に対応して
金属磁性材料を用いた狭ギャップのヘッドが求められて
きている。金属磁性材料で総称されるFe−Aj!−S
i合金(センダストと称される)、Ni−Fe合金(パ
ーマロイ)等の結晶質磁性合金、あるいは非晶質合金を
用いた磁気ヘッドは、一般にフェライト材より飽和磁束
密度が高く、かつ、摺動ノイズも少ないという優れた特
徴を有しているが、加工が難しいという欠点を有してい
た。このような金属磁性材料に限らずフェライトに対し
ても、従来の貼合わせによるギャップ形成法により精度
のよいギャップ長を得るためには、ギャップ形成面の仕
上精度は勿論のこと、ガラス等の異種材料との熱膨張差
、加工による歪等を原因とするコア半体の反りを小さく
させること等が必要であり高度な研磨技術が要求される
。特にギャップ長が小さくなるほど、ギャップ長のばら
つきのため求めるヘッド特性が安定して得られず、その
結果歩留りを低下させることになる。In recent years, with the development of high-density magnetic recording, the use of r-Fe203, metal magnetic powder, barium ferrite, and the like as recording media is being considered to meet the demand for improved recording density. In response to changes in recording media, there is a growing demand for narrow gap magnetic heads using metallic magnetic materials. Fe-Aj, a generic name for metallic magnetic materials! -S
Magnetic heads using crystalline magnetic alloys such as i-alloy (referred to as sendust) and Ni-Fe alloy (permalloy), or amorphous alloys generally have a higher saturation magnetic flux density than ferrite materials, and have a higher sliding resistance. Although it has an excellent feature of low noise, it has the drawback of being difficult to process. In order to obtain a highly accurate gap length using the conventional bonding gap forming method, not only for metal magnetic materials but also for ferrite, it is necessary to not only improve the finishing accuracy of the gap forming surface but also to prevent dissimilar materials such as glass. It is necessary to reduce the warpage of the core half due to differences in thermal expansion with the material, distortion due to processing, etc., and advanced polishing techniques are required. In particular, as the gap length becomes smaller, desired head characteristics cannot be stably obtained due to variations in the gap length, resulting in lower yields.
発明が解決しようとする問題点
高密度磁気記録用の磁気ヘッドにおいては狭ギャップ化
が不可欠である。このような狭ギャップ長のヘッドに対
して上に述べた従来の構造、製造法によるヘッドでは、
磁気ギャップの形成工程が最も歩留りを低下させる工程
となっておりギャップ精度の歩留りの低さがコストを高
くする大きな原因となっている。Problems to be Solved by the Invention Narrowing the gap is essential in a magnetic head for high-density magnetic recording. For heads with such narrow gap lengths, the heads with the conventional structure and manufacturing method described above,
The process of forming the magnetic gap is the process that reduces the yield the most, and the low yield of gap accuracy is a major cause of high costs.
問題点を解決するための手段
本発明は、磁性材料からなるコア半体に巻線穴を設はギ
ャップ面上に、所定の膜厚のギャップ部材、および閉磁
路を構成する軟磁性薄膜を重ねて形成して磁気回路を構
成する磁気ヘッドとすることにより、上記問題点を解決
をしようとするものである。Means for Solving the Problems The present invention provides a winding hole in a core half made of a magnetic material, and overlies a gap member with a predetermined thickness and a soft magnetic thin film constituting a closed magnetic circuit on the gap surface. The present invention attempts to solve the above-mentioned problems by forming a magnetic head that constitutes a magnetic circuit.
作用
ギャップ形成を従来の貼合わせによる方法によらずm
IIIを重ねて形成する方法によっているためギャップ
長精度が高く歩留りのよいヘッドを安価に製造できる。Functional gap formation is not dependent on the conventional method of lamination.
Since this method is used to form layers III overlapping each other, a head with high gap length accuracy and good yield can be manufactured at low cost.
実施例
以下本発明の一実施例について、図面を用いて、詳細に
説明する。EXAMPLE Hereinafter, an example of the present invention will be described in detail with reference to the drawings.
実施例1
第1図は、本発明の磁気ヘッドの構造を示す斜視図であ
る。この磁気ヘッドの磁気回路は巻線穴5を設けたコア
半体1とギャップ部材3を挟んで軟磁性薄1)92から
構成されている。非磁性材料6はコア半体lにトラック
幅規制用に溝を施した後非磁性材料6を埋め込んだもの
であり、また巻線溝8は、巻線穴5を残してギャップ形
成面側を覆うように非磁性材4により埋め込まれてあり
、実質的に平面になっているコア半体のギャップ形成面
上にギャップ部材、軟磁性i[が重ねて形成されている
。Embodiment 1 FIG. 1 is a perspective view showing the structure of a magnetic head of the present invention. The magnetic circuit of this magnetic head consists of a core half 1 provided with a winding hole 5 and a soft magnetic thin film 1) 92 with a gap member 3 in between. The non-magnetic material 6 is made by forming a groove on the core half l to regulate the track width and then embedding the non-magnetic material 6 therein, and the winding groove 8 is formed by leaving the winding hole 5 on the gap forming surface side. A gap member, a soft magnetic material i[, is formed in an overlapping manner on the gap forming surface of the core half, which is covered with a non-magnetic material 4 and is substantially flat.
以下にこの磁気ヘッドの具体的な製造方法を図面を用い
て詳細に説明する。A specific method of manufacturing this magnetic head will be described below in detail with reference to the drawings.
第2図は、本発明の磁気ヘッドの製造方法を示す工程図
である。第2図+alに示すように、コア半体となるべ
き所定の寸法のセンダストバルク材1にトラック幅を規
制するトラックモールド溝7nの加工を行う。次に第2
図(C1に示すようにトラックモールド溝にガラス6n
を750℃で加熱熔融して充填した後表面を研削する。FIG. 2 is a process diagram showing the method for manufacturing the magnetic head of the present invention. As shown in FIG. 2+al, a track mold groove 7n for regulating the track width is formed in the sendust bulk material 1 having a predetermined size to become the core half. Then the second
The glass 6n is placed in the track mold groove as shown in Figure (C1)
After heating and melting at 750°C and filling, the surface is ground.
さらに、第2図+diに示す巻線溝8の加工を行った後
第2図Telに示すように巻線溝に巻線穴5を残してギ
ャップ形成面側を覆うように非磁性材料4(本実施例で
はガラスを加熱溶融して用いた)を埋め込んだ後ギャッ
プ形成面9を研磨する。次に第2図(flに示すように
そのギャップ形成面上に所定の厚さ(本実施例では0.
3μm)のギャップ部材3としてCrをスパッタリング
により形成した後、一方の磁気回路を構成する軟磁性薄
膜(本実施例ではFe−Al−Siを主成分とする合金
isを用いた)2をスパッタリングによりギャップ部材
の上に重ねて形成する。このようにして磁気ヘッドブロ
ック10は作製される。さらに第2図(glに示すよう
に第一の磁気ヘッドブロックと、非磁性材料(たとえば
セラミック、ガラス等)1)を接着材12(本実施例で
はガラスを500℃で加熱溶融して用いた)により接着
して第2図(h)に示す磁気ヘッドブロック13を得、
破線に示す位置で切断することにより第1図に示す磁気
ヘッドが得られる。Furthermore, after processing the winding groove 8 shown in FIG. 2 +di, a non-magnetic material 4 ( In this embodiment, the gap forming surface 9 is polished. Next, as shown in FIG.
After forming a gap member 3 of Cr (3 μm) by sputtering, a soft magnetic thin film (in this example, an alloy IS mainly composed of Fe-Al-Si was used) 2 constituting one magnetic circuit was formed by sputtering. Formed overlying the gap member. The magnetic head block 10 is manufactured in this manner. Furthermore, as shown in FIG. ) to obtain the magnetic head block 13 shown in FIG. 2(h).
By cutting at the positions indicated by broken lines, the magnetic head shown in FIG. 1 is obtained.
上述のようにして製造される磁気ヘッドは工程数も少な
く、とりわけギャップ形成工程が従来のような貼合わせ
工程によらず薄膜を重ねて形成する方法のため極めて歩
留りが良く安価に製造することができる。またコアとし
て金属磁性合金を用いているので記録特性が良好である
ためバリニウムフェライト。メタル磁性粉等の高密度記
録用媒体に対しても優れた特性を示した。The magnetic head manufactured as described above requires a small number of steps, and in particular, the gap forming step is formed by stacking thin films instead of the conventional bonding process, so it has an extremely high yield and can be manufactured at low cost. can. Valinium ferrite also has good recording properties because it uses a metal magnetic alloy as the core. It also showed excellent properties for high-density recording media such as metal magnetic powder.
実施例2
実施例1の軟磁性薄膜2の代りに、Goを主成分とする
アモルファス合金薄膜を用いて実施例1と同様の工程に
より磁気ヘッドを作製した0本実施例の場合にはアモル
ファス合金薄膜の耐熱性を考慮して、ガラスを加熱溶融
する際の加熱温度は500℃程度以下とした。こうして
得られた磁気ヘッドの磁気特性、および信転性は実施例
1と同様に良好なものであった。Example 2 In place of the soft magnetic thin film 2 of Example 1, a magnetic head was fabricated using an amorphous alloy thin film containing Go as the main component in the same process as Example 1. In this example, an amorphous alloy thin film was used. Considering the heat resistance of the thin film, the heating temperature when heating and melting the glass was set to about 500° C. or less. The magnetic properties and reliability of the thus obtained magnetic head were as good as in Example 1.
実施例3
実施例1で軟磁性薄膜2として用いたFa−AI−81
合金薄膜の代りに、F’5−Niを主成分とする合金f
ill!を用いて実施例1と同様の工程により磁気ヘッ
ドを作製した。こうして得られた磁気ヘッドの磁気特性
、および信鯨性は実施例1と同様に良好なものであった
。Example 3 Fa-AI-81 used as soft magnetic thin film 2 in Example 1
Instead of alloy thin film, alloy f whose main component is F'5-Ni
ill! A magnetic head was manufactured using the same steps as in Example 1. The magnetic properties and reliability of the thus obtained magnetic head were as good as in Example 1.
実施例4
実施例1,2.3で用いたFe−Ajl−3Lを主成分
とする合金薄膜、Coを主成分とするアモルファス合金
薄膜、Fe−NLを主成分とする合金薄膜の代わりに軟
磁性薄膜2としてFe−C(13at%)化合物薄膜を
用いて実施例1と同様にして複合磁気ヘッドを作製した
。得られた磁気ヘッドは実施例1,2.3と同様良好な
ものであった。他に軟磁性薄膜2としてN(7at%)
。Example 4 In place of the alloy thin film mainly composed of Fe-Ajl-3L used in Examples 1 and 2.3, the amorphous alloy thin film mainly composed of Co, and the alloy thin film mainly composed of Fe-NL, soft A composite magnetic head was fabricated in the same manner as in Example 1 using an Fe-C (13 at%) compound thin film as the magnetic thin film 2. The obtained magnetic head was as good as Examples 1, 2.3. In addition, N (7 at%) is used as the soft magnetic thin film 2.
.
P(10at%)をそれぞれ含む化合物薄膜を用いて作
製した磁気ヘッドも上述の実施例同様良好なものであっ
た。Magnetic heads manufactured using compound thin films containing P (10 at %) were also good as in the above-mentioned examples.
発明の効果
以上のように本発明は、巻線穴を設けたコア半体のギャ
ップ形成面上に所定の膜厚のギャップ部材、および、閉
磁路を構成する軟磁性薄膜を重ねて形成している磁気ヘ
ッドであるため、磁気ギャップの形成が精度良くでき、
磁気特性が良好で信鎖性の高い磁気ヘッドが加工歩留り
良く安価に製造できるものである。Effects of the Invention As described above, the present invention includes forming a gap member having a predetermined film thickness and a soft magnetic thin film constituting a closed magnetic path on the gap forming surface of a core half provided with a winding hole. Because it is a magnetic head that can form a magnetic gap with high precision,
A magnetic head with good magnetic properties and high reliability can be manufactured at low cost and with good processing yield.
第1図は本発明の複合磁気ヘッドの構造を示す斜視図、
第2図は本発明の実施例におけるヘッドの製造方法を説
明する工程図である。
1・・・・・・コア半体、2・・・・・・軟磁性薄膜、
3・・・・・・ギャップ部材、4・・・・・・非磁性材
料、5・・・・・・@線入、6.6n・・・・・・トラ
ンクモールドガラス、7n・・・・・・トラック溝、8
・・・・・・@線溝、9・・・・・・ギャップ形成面、
10・・・・・・磁気ヘッドブロック1)1)・・・・
・・非磁性材料、12・・・・・・接着剤、13・・・
・・・磁気ヘッドブロック■。
代理人の氏名 弁理士 中尾敏男 はか1名第1図
3ギツプ舖■才
第2図FIG. 1 is a perspective view showing the structure of the composite magnetic head of the present invention;
FIG. 2 is a process diagram illustrating a method for manufacturing a head in an embodiment of the present invention. 1... Core half, 2... Soft magnetic thin film,
3... Gap member, 4... Non-magnetic material, 5... @ wire included, 6.6n... Trunk mold glass, 7n... ...Track groove, 8
...@line groove, 9...gap forming surface,
10...Magnetic head block 1)1)...
...Nonmagnetic material, 12...Adhesive, 13...
...Magnetic head block ■. Name of agent: Patent attorney Toshio Nakao (1 person) Figure 1: 3 years old Figure 2
Claims (5)
ップ面上に所定のギャップ部材と閉磁路を構成する軟磁
性薄膜を重ねて構成されていることを特徴とする磁気ヘ
ッド。(1) A magnetic head characterized in that a core half made of a magnetic material is provided with a winding hole, and a predetermined gap member and a soft magnetic thin film forming a closed magnetic path are stacked on the gap surface.
巻線溝に前記巻線穴を残してギャップ形成面を覆うよう
に非磁性材料が埋め込まれてあることを特徴とする特許
請求の範囲第(1)項記載の磁気ヘッド。(2) A patent characterized in that the winding hole provided in the core half made of magnetic material is embedded with a non-magnetic material so as to leave the winding hole in the winding groove and cover the gap forming surface. A magnetic head according to claim (1).
用することを特徴とする特許請求の範囲第(1)項記載
の磁気ヘッド。(3) The magnetic head according to claim (1), wherein a metal material such as Cr or Mo is used as the gap member.
金薄膜またはFe−Niを主成分とする合金薄膜または
Coを主成分とするアモルファス合金薄膜の何れかであ
ることを特徴とする特許請求の範囲第(1)項記載の磁
気ヘッド。(4) The soft magnetic thin film is characterized in that it is either an alloy thin film containing Fe-Al-Si as a main component, an alloy thin film containing Fe-Ni as a main component, or an amorphous alloy thin film containing Co as a main component. A magnetic head according to claim (1).
1つを含むFeを主成分とする化合物薄膜であることを
特徴とする特許請求の範囲第(1)項記載の磁気ヘッド
。(5) The magnetic head according to claim (1), wherein the soft magnetic thin film is a compound thin film mainly composed of Fe and containing at least one of C, N, and P.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP32312887A JPH01165007A (en) | 1987-12-21 | 1987-12-21 | Magnetic head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP32312887A JPH01165007A (en) | 1987-12-21 | 1987-12-21 | Magnetic head |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01165007A true JPH01165007A (en) | 1989-06-29 |
Family
ID=18151399
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP32312887A Pending JPH01165007A (en) | 1987-12-21 | 1987-12-21 | Magnetic head |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01165007A (en) |
-
1987
- 1987-12-21 JP JP32312887A patent/JPH01165007A/en active Pending
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