JPH01164762U - - Google Patents
Info
- Publication number
- JPH01164762U JPH01164762U JP6121188U JP6121188U JPH01164762U JP H01164762 U JPH01164762 U JP H01164762U JP 6121188 U JP6121188 U JP 6121188U JP 6121188 U JP6121188 U JP 6121188U JP H01164762 U JPH01164762 U JP H01164762U
- Authority
- JP
- Japan
- Prior art keywords
- feeding plate
- power
- power feeding
- wafer
- around
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007747 plating Methods 0.000 description 1
Landscapes
- Electrodes Of Semiconductors (AREA)
Description
第１図は、この考案の一実施例によるめつき電
極を示す断面斜視図、第２図はこの考案の他の実
施例を示すめつき電極の断面斜視図、第３図は従
来のめつき電極の断面図を示す。
図において、１は絶縁皮膜、２は電極ピン、３
は電極パターン、４はウエハ、５は給電用平板、
６は給電用薄板である。なお、図中、同一符号は
同一又は相当部分を示す。
FIG. 1 is a cross-sectional perspective view showing a plated electrode according to an embodiment of this invention, FIG. 2 is a cross-sectional perspective view of a plated electrode according to another embodiment of this invention, and FIG. 3 is a conventional plating electrode. A cross-sectional view of the electrode is shown. In the figure, 1 is an insulating film, 2 is an electrode pin, and 3
is an electrode pattern, 4 is a wafer, 5 is a power supply flat plate,
6 is a thin plate for power feeding. In addition, in the figures, the same reference numerals indicate the same or corresponding parts.
Claims (1)
に、切り込みを入れた給電用薄板を取付けたこと
を特徴とするめつき電極。 A plated electrode characterized by having a thin power feeding plate with a notch attached under a flat power feeding plate for feeding power from around the wafer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6121188U JPH01164762U (en) | 1988-05-10 | 1988-05-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6121188U JPH01164762U (en) | 1988-05-10 | 1988-05-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01164762U true JPH01164762U (en) | 1989-11-17 |
Family
ID=31286887
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6121188U Pending JPH01164762U (en) | 1988-05-10 | 1988-05-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01164762U (en) |
-
1988
- 1988-05-10 JP JP6121188U patent/JPH01164762U/ja active Pending