JPH01164243U - - Google Patents

Info

Publication number
JPH01164243U
JPH01164243U JP6093788U JP6093788U JPH01164243U JP H01164243 U JPH01164243 U JP H01164243U JP 6093788 U JP6093788 U JP 6093788U JP 6093788 U JP6093788 U JP 6093788U JP H01164243 U JPH01164243 U JP H01164243U
Authority
JP
Japan
Prior art keywords
substrate
gripping parts
parts
utility
model registration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6093788U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6093788U priority Critical patent/JPH01164243U/ja
Publication of JPH01164243U publication Critical patent/JPH01164243U/ja
Pending legal-status Critical Current

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  • Sheets, Magazines, And Separation Thereof (AREA)
JP6093788U 1988-05-09 1988-05-09 Pending JPH01164243U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6093788U JPH01164243U (ko) 1988-05-09 1988-05-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6093788U JPH01164243U (ko) 1988-05-09 1988-05-09

Publications (1)

Publication Number Publication Date
JPH01164243U true JPH01164243U (ko) 1989-11-16

Family

ID=31286630

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6093788U Pending JPH01164243U (ko) 1988-05-09 1988-05-09

Country Status (1)

Country Link
JP (1) JPH01164243U (ko)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011003641A (ja) * 2009-06-17 2011-01-06 Ys Kk 基板取出機構及びこれを備えた基板供給装置
CN107150906A (zh) * 2016-03-04 2017-09-12 株式会社长冈制作所 工件分离系统及工件分离方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62171833A (ja) * 1986-01-24 1987-07-28 Hitachi Electronics Eng Co Ltd 板状物取り扱い機構

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62171833A (ja) * 1986-01-24 1987-07-28 Hitachi Electronics Eng Co Ltd 板状物取り扱い機構

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011003641A (ja) * 2009-06-17 2011-01-06 Ys Kk 基板取出機構及びこれを備えた基板供給装置
CN107150906A (zh) * 2016-03-04 2017-09-12 株式会社长冈制作所 工件分离系统及工件分离方法
JP2017160055A (ja) * 2016-03-04 2017-09-14 株式会社ナガオカ製作所 ワークを分離するシステムおよびその方法
TWI643801B (zh) * 2016-03-04 2018-12-11 長岡制作所股份有限公司 Workpiece separation and transportation system and method
CN107150906B (zh) * 2016-03-04 2020-08-07 株式会社长冈制作所 工件分离系统及工件分离方法

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