JPH01162699U - - Google Patents

Info

Publication number
JPH01162699U
JPH01162699U JP5876388U JP5876388U JPH01162699U JP H01162699 U JPH01162699 U JP H01162699U JP 5876388 U JP5876388 U JP 5876388U JP 5876388 U JP5876388 U JP 5876388U JP H01162699 U JPH01162699 U JP H01162699U
Authority
JP
Japan
Prior art keywords
movable
movable table
work stage
rolling elements
table device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5876388U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5876388U priority Critical patent/JPH01162699U/ja
Publication of JPH01162699U publication Critical patent/JPH01162699U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Details Of Measuring And Other Instruments (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP5876388U 1988-04-30 1988-04-30 Pending JPH01162699U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5876388U JPH01162699U (enExample) 1988-04-30 1988-04-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5876388U JPH01162699U (enExample) 1988-04-30 1988-04-30

Publications (1)

Publication Number Publication Date
JPH01162699U true JPH01162699U (enExample) 1989-11-13

Family

ID=31284561

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5876388U Pending JPH01162699U (enExample) 1988-04-30 1988-04-30

Country Status (1)

Country Link
JP (1) JPH01162699U (enExample)

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