JPH01162692A - Air bearing type clean lift - Google Patents

Abstract

PURPOSE: To reduce strength of a guide rail by arranging a lifting guide rail in its slant attitude, guiding and supporting a lifter by an air bearing on the three side surfaces of the guide rail, and fixing and supporting the guide rail by the residual one side surface. CONSTITUTION: A lifting guide rail 1 is arranged in its slant attitude so that an air supply passage 2 is formed over the inside total length. Air is blown out from the air supply passage 2 to air blowout holes 31 bored at prescribed intervals in the three side surfaces 1a, 1b, 1c of a guide rail 1. A lifter 6 is lifted in a noncontact state as an air bearing by air injection from the three side surfaces, 1a, 1b, 1c, does not fall off in the shape of pressing the lifter 6 to the inclined surface 1a, and is fixed to a column by a bracket 5 arranged in a proper place of the unguided other side surface 1d. Therefore, since the lifting guide 1 can be supported and fixed by plural places, structural strength can be reduced.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an air bearing type clean lift.

[Conventional technology and its problems]

Conventionally, as an article transfer device in a clean room, a moving body is provided on a guide rod via a bearing, and this moving body is provided with an attachment suitable for transferring articles.

For this reason, the friction surface between the guide rod and the moving body
@Dust may be generated due to rubbing, etc., or dust may be generated from the means of transportation of this moving body. For this reason, there was a problem that it was not suitable for use in a high-grade clean area within a clean room. To improve this, a device has been proposed that does not generate dust by injecting compressed air into the movable body and forming an air film between it and the fixed body to form an air bearing section, as shown in Figure 5. .

However, lifts using air bearings have vertical guide rails. Therefore, in order to support the moment generated on the guide rail by the conveyed object, the elevating body needs to be guided and supported uniformly around the entire circumference of the cross section of the guide rail. Because this air bearing type lift cannot support the guide rail at its intermediate portion due to its structure, severe manufacturing and assembly accuracy of the guide rail is required.

Furthermore, since this guide rail is supported only at both ends thereof, it must have great strength, resulting in a large and expensive structure.

In the present invention, by arranging the guide rail and the lifting wire rope at an angle, force is applied to the guide rail in only one direction by horizontal force component of the wire rope and the sum of moment force. The purpose of this invention is to simplify and reduce the cost of manufacturing a guide rail by requiring precision only on three sides.

[Means for solving problems]

In an elevating device that has an elevating guide rail that guides an elevating object without contact using air bearings, the elevating guide rail is installed inclined from the vertical, and the elevating object that moves up and down along the guide rail is mounted on three sides of the guide rail. Provide guidance and support. [Embodiment] A first embodiment of the air bearing type lift of the present invention will be described below with reference to FIGS. 1, 2, and 3.

In the figure, reference numeral 1 denotes a rectangular lifting guide rail, which has a required length and cross-sectional shape, and has one or more air supply passages 2 that supply pressurized air over its entire internal length. Three sides 1a, lb of the lifting guide rail 1 from the supply path 2.

A large number of air jet holes 3, 3°3, which are opened at predetermined intervals in the IC.
... to be drilled. This air jet hole 3 is designed so that the lifting body can be moved without contacting the lifting guide rail by the air pressure injected from this air jet hole over almost the entire length of the lifting guide rail 1 or at least the lifting process of the lifting body. Their number, installation interval, etc. are determined. Also, the three sides 1a, lb, l of the elevating guide rail that opens this air jet hole 3
c is finished with the precision required in the design, and the other side 1d does not require precision because it does not face or contact the elevating body.

One side 1d of the elevating guide rail l that does not guide and support the elevating object is attached to the support, tower, or other fixed side 4 at a slight inclination from the vertical, and the upper and lower ends of the elevating guide rail 1 are fixed and fixed as necessary. Brackets 5 are arranged at two or more intermediate positions of the rail, and the rear surface of the intermediate portion of the elevating guide rail is supported on the fixed side via the brackets 5. The inclination angle of this elevating guide rail is such that when the elevating object moves up and down along the rail, it is always pressed against the guide rail surface 1a with a certain degree of force so that it does not separate from the guide rail surface and no moment is applied locally. It is determined in this manner.

Since the elevating body is guided and supported on the three sides of this elevating guide rail without contact, the middle part of the guide rail can be supported on the fixed side using the other side, so it is possible to have more strength than necessary as in the past. It is not necessary to manufacture guide rails separately, and assembly accuracy is also improved.

The elevating body 6 includes a loading platform 61 having a size and shape suitable for placing objects to be transported, and a guide body 62 that is aligned with three sides of the elevating guide rail. This guide body 62 is the three sides 1a and lb of the lifting guide rail.

The guide body 62 is formed in a U-shape so as to face each IC in a non-contact manner, and the distance between the rail surfaces 1a, lb, and lc and the guide body 62 maintains a preset accuracy, so that the three sides of the elevating guide rail and the guide An air bearing is configured between the bodies, and the elevating body can be moved up and down along the elevating guide rail without contact.

Further, a bracket 63 is provided protruding from this elevating body 6, and one end of the elevating wire rope 7 is engaged with this bracket 63. The lifting wire rope 7 is hung on a rope sheep 8 provided on the fixed side of the upper end of the lifting guide rail, and then wound around the lifting device 9 so as to be able to be wound up and unwound. The elevating body is raised and lowered via the wire rope by driving this elevating device.

The elevating body suspended by a wire rope from the drive device is pressed against one side 1a of the elevating guide rail by its gravity, and is supported in a non-contact manner while maintaining balance with the buoyancy of the compressed air injected from the air outlet 3. Ru. Furthermore, the elevating body is guided by the compressed air q1 jetted from the air jet holes 3 provided on the two opposing sides 1b and lc of the elevating guide rail without contacting both the left and right side surfaces of the elevating guide rail. In this state, the elevating body is raised and lowered by winding up and lowering the wire rope. According to this embodiment, it is good if there is little change in the weight of the conveyed object, but if the weight of the conveyed object changes, the center of gravity of the elevating body 6 will move, and the center of gravity of the elevating body 6 will move from the center of gravity of the elevating body 6 to the elevating guide. It becomes impossible to keep the distance to the rail 1 and the distance from the hot point of the elevating body of the wire row 17 to the elevating guide rail 1 constant so that no overturning moment occurs.

FIG. 4 shows a second embodiment of the present invention, in which two sets of brackets 63 are provided on the elevating body and the elevating body 6 is supported by two wire ropes.

In this embodiment, 1. Even if the weight of the transported object changes and the center of gravity of the elevating body 6 moves, the tension of the two wire ropes changes so that the overturning moment can be taken. It can handle changes in weight.

Therefore, if the weight of the conveyed object is not constant but changes, this embodiment can be used.

〔Effect of the invention〕

According to the present invention, since the elevating body is guided by the three sides of the elevating guide rail, the remaining one side does not require severe precision, making it easy to manufacture and install the guide rail, and the guide rail. It is also possible to hold it in the middle part, without requiring more strength than necessary as in the past.
It has the advantage of being able to be installed with high precision.

An external view showing the body, FIG. 4 is a known example.

1 is a lifting guide rail, la, lb, lc.

1d is the side surface, 3 is the air outlet, 4 is the fixed side, 5 is the bracket, 6 is the lifting platform, 62 is the guide body, 7 is the wire rope for lifting and 1 other person.

Claims (1)

[Claims] In an elevating device that has an elevating guide rail that guides an elevating object without contact using air bearings, the elevating guide rail is installed inclined from the vertical, and the elevating object that moves up and down along the guide rail is mounted on three sides of the guide rail. An air bearing type clean lift characterized by a guiding support.