JPH01161600U - - Google Patents
Info
- Publication number
- JPH01161600U JPH01161600U JP5974388U JP5974388U JPH01161600U JP H01161600 U JPH01161600 U JP H01161600U JP 5974388 U JP5974388 U JP 5974388U JP 5974388 U JP5974388 U JP 5974388U JP H01161600 U JPH01161600 U JP H01161600U
- Authority
- JP
- Japan
- Prior art keywords
- circular tube
- gas supply
- supply chamber
- end wall
- end portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000006698 induction Effects 0.000 claims description 2
- 239000000463 material Substances 0.000 claims 1
- 239000010453 quartz Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
Landscapes
- Plasma Technology (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5974388U JPH0633679Y2 (ja) | 1988-05-02 | 1988-05-02 | インダクションプラズマ用トーチ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5974388U JPH0633679Y2 (ja) | 1988-05-02 | 1988-05-02 | インダクションプラズマ用トーチ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01161600U true JPH01161600U (fr) | 1989-11-09 |
JPH0633679Y2 JPH0633679Y2 (ja) | 1994-08-31 |
Family
ID=31285490
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5974388U Expired - Lifetime JPH0633679Y2 (ja) | 1988-05-02 | 1988-05-02 | インダクションプラズマ用トーチ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0633679Y2 (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008508683A (ja) * | 2004-07-30 | 2008-03-21 | アマランテ テクノロジーズ,インク. | 均一でスケーラブルなマイクロ波プラズマ発生を行うためのプラズマノズルアレイ |
-
1988
- 1988-05-02 JP JP5974388U patent/JPH0633679Y2/ja not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008508683A (ja) * | 2004-07-30 | 2008-03-21 | アマランテ テクノロジーズ,インク. | 均一でスケーラブルなマイクロ波プラズマ発生を行うためのプラズマノズルアレイ |
Also Published As
Publication number | Publication date |
---|---|
JPH0633679Y2 (ja) | 1994-08-31 |