JPH01161600U - - Google Patents
Info
- Publication number
- JPH01161600U JPH01161600U JP5974388U JP5974388U JPH01161600U JP H01161600 U JPH01161600 U JP H01161600U JP 5974388 U JP5974388 U JP 5974388U JP 5974388 U JP5974388 U JP 5974388U JP H01161600 U JPH01161600 U JP H01161600U
- Authority
- JP
- Japan
- Prior art keywords
- circular tube
- gas supply
- supply chamber
- end wall
- end portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000006698 induction Effects 0.000 claims description 2
- 239000000463 material Substances 0.000 claims 1
- 239000010453 quartz Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
Landscapes
- Plasma Technology (AREA)
Description
第１図はこの考案の１実施例の縦断側面図、第
２図は第１図のＢ−Ｂ断面図、第３図は従来のイ
ンダクシヨンプラズマ用トーチの１例を示す縦断
側面図、第４図は第３図のＡ−Ａ断面図である。
１１……円管、１２……端壁、１３……ガス供
給室、１４……小径管、１５……ガス入口、２２
……プラズマ、２４……高周波コイル。
FIG. 1 is a longitudinal sectional side view of one embodiment of this invention, FIG. 2 is a sectional view taken along line BB in FIG. 1, and FIG. 3 is a longitudinal sectional side view showing an example of a conventional induction plasma torch. FIG. 4 is a sectional view taken along line AA in FIG. 3. 11... Circular pipe, 12... End wall, 13... Gas supply chamber, 14... Small diameter pipe, 15... Gas inlet, 22
...Plasma, 24...High frequency coil.
Claims (1)
の円管の一方の端部を閉じるように設けられた端
壁と、その端壁を隔てて外側に設けられたガス供
給室と、前記円管内の前記端壁側に配置され少な
くとも先端部が円管の内周面に沿つた螺旋状部に
形成され基端部が端壁に結合されて前記ガス供給
室と円管内とを内孔を介して連通している小径管
と、前記ガス供給室に対して設けたガス入口とを
具備するインダクシヨンプラズマ用トーチ。 A circular tube made of quartz or a similar material, an end wall provided to close one end of the circular tube, a gas supply chamber provided outside the end wall, and inside the circular tube. is arranged on the end wall side of the tube, at least the distal end portion is formed in a spiral shape along the inner circumferential surface of the circular tube, and the proximal end portion is connected to the end wall to connect the gas supply chamber and the inside of the circular tube through an inner hole. An induction plasma torch comprising a small diameter pipe communicating with the gas supply chamber and a gas inlet provided to the gas supply chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5974388U JPH0633679Y2 (en) | 1988-05-02 | 1988-05-02 | Torch for induction plasma |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5974388U JPH0633679Y2 (en) | 1988-05-02 | 1988-05-02 | Torch for induction plasma |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01161600U true JPH01161600U (en) | 1989-11-09 |
| JPH0633679Y2 JPH0633679Y2 (en) | 1994-08-31 |
Family
ID=31285490
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5974388U Expired - Lifetime JPH0633679Y2 (en) | 1988-05-02 | 1988-05-02 | Torch for induction plasma |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0633679Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008508683A (en) * | 2004-07-30 | 2008-03-21 | アマランテ テクノロジーズ，インク． | Plasma nozzle array for uniform and scalable microwave plasma generation |
-
1988
- 1988-05-02 JP JP5974388U patent/JPH0633679Y2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008508683A (en) * | 2004-07-30 | 2008-03-21 | アマランテ テクノロジーズ，インク． | Plasma nozzle array for uniform and scalable microwave plasma generation |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0633679Y2 (en) | 1994-08-31 |