JPH01159582U - - Google Patents
Info
- Publication number
- JPH01159582U JPH01159582U JP5398188U JP5398188U JPH01159582U JP H01159582 U JPH01159582 U JP H01159582U JP 5398188 U JP5398188 U JP 5398188U JP 5398188 U JP5398188 U JP 5398188U JP H01159582 U JPH01159582 U JP H01159582U
- Authority
- JP
- Japan
- Prior art keywords
- field
- magnet
- type linear
- motor
- movable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 1
Landscapes
- Linear Motors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988053981U JPH0635659Y2 (ja) | 1988-04-20 | 1988-04-20 | 可動磁石形リニア直流モータ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988053981U JPH0635659Y2 (ja) | 1988-04-20 | 1988-04-20 | 可動磁石形リニア直流モータ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01159582U true JPH01159582U (pl) | 1989-11-06 |
JPH0635659Y2 JPH0635659Y2 (ja) | 1994-09-14 |
Family
ID=31279932
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1988053981U Expired - Lifetime JPH0635659Y2 (ja) | 1988-04-20 | 1988-04-20 | 可動磁石形リニア直流モータ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0635659Y2 (pl) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006191093A (ja) * | 2004-12-29 | 2006-07-20 | Asml Netherlands Bv | リソグラフィ装置およびアクチュエータ |
JP2007282350A (ja) * | 2006-04-05 | 2007-10-25 | Sanyo Denki Co Ltd | リニアモータ |
JP2008253130A (ja) * | 2007-03-08 | 2008-10-16 | Sanyo Denki Co Ltd | リニアモータ |
JP2015089189A (ja) * | 2013-10-29 | 2015-05-07 | 株式会社安川電機 | リニアモータ |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57113465A (en) * | 1980-12-31 | 1982-07-14 | Ibm | Magnetic recording disk-file |
JPS60237854A (ja) * | 1984-05-11 | 1985-11-26 | Tokyo Seimitsu Co Ltd | リニアモ−タ |
JPS62198876U (pl) * | 1986-06-10 | 1987-12-17 |
-
1988
- 1988-04-20 JP JP1988053981U patent/JPH0635659Y2/ja not_active Expired - Lifetime
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57113465A (en) * | 1980-12-31 | 1982-07-14 | Ibm | Magnetic recording disk-file |
JPS60237854A (ja) * | 1984-05-11 | 1985-11-26 | Tokyo Seimitsu Co Ltd | リニアモ−タ |
JPS62198876U (pl) * | 1986-06-10 | 1987-12-17 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006191093A (ja) * | 2004-12-29 | 2006-07-20 | Asml Netherlands Bv | リソグラフィ装置およびアクチュエータ |
JP4528260B2 (ja) * | 2004-12-29 | 2010-08-18 | エーエスエムエル ネザーランズ ビー.ブイ. | リソグラフィ装置およびアクチュエータ |
JP2007282350A (ja) * | 2006-04-05 | 2007-10-25 | Sanyo Denki Co Ltd | リニアモータ |
JP2008253130A (ja) * | 2007-03-08 | 2008-10-16 | Sanyo Denki Co Ltd | リニアモータ |
JP2015089189A (ja) * | 2013-10-29 | 2015-05-07 | 株式会社安川電機 | リニアモータ |
Also Published As
Publication number | Publication date |
---|---|
JPH0635659Y2 (ja) | 1994-09-14 |
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