JPH01158940U - - Google Patents
Info
- Publication number
- JPH01158940U JPH01158940U JP5358188U JP5358188U JPH01158940U JP H01158940 U JPH01158940 U JP H01158940U JP 5358188 U JP5358188 U JP 5358188U JP 5358188 U JP5358188 U JP 5358188U JP H01158940 U JPH01158940 U JP H01158940U
- Authority
- JP
- Japan
- Prior art keywords
- inspected
- vacuum chamber
- supplies
- cascade
- arm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007689 inspection Methods 0.000 claims description 4
Landscapes
- Examining Or Testing Airtightness (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5358188U JPH01158940U (uk) | 1988-04-22 | 1988-04-22 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5358188U JPH01158940U (uk) | 1988-04-22 | 1988-04-22 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01158940U true JPH01158940U (uk) | 1989-11-02 |
Family
ID=31279550
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5358188U Pending JPH01158940U (uk) | 1988-04-22 | 1988-04-22 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01158940U (uk) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59133445A (ja) * | 1983-01-20 | 1984-07-31 | Furukawa Seisakusho:Kk | 包装製品のピンホール検出装置 |
JPS6032128A (ja) * | 1983-07-30 | 1985-02-19 | Konishiroku Photo Ind Co Ltd | 磁気記録媒体の製造方法 |
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1988
- 1988-04-22 JP JP5358188U patent/JPH01158940U/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59133445A (ja) * | 1983-01-20 | 1984-07-31 | Furukawa Seisakusho:Kk | 包装製品のピンホール検出装置 |
JPS6032128A (ja) * | 1983-07-30 | 1985-02-19 | Konishiroku Photo Ind Co Ltd | 磁気記録媒体の製造方法 |