JPH01157428U - - Google Patents
Info
- Publication number
- JPH01157428U JPH01157428U JP4702588U JP4702588U JPH01157428U JP H01157428 U JPH01157428 U JP H01157428U JP 4702588 U JP4702588 U JP 4702588U JP 4702588 U JP4702588 U JP 4702588U JP H01157428 U JPH01157428 U JP H01157428U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- scratch
- needle
- inspecting
- bringing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 239000003550 marker Substances 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
Landscapes
- Testing Electric Properties And Detecting Electric Faults (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4702588U JPH01157428U (en:Method) | 1988-04-07 | 1988-04-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4702588U JPH01157428U (en:Method) | 1988-04-07 | 1988-04-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01157428U true JPH01157428U (en:Method) | 1989-10-30 |
Family
ID=31273259
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4702588U Pending JPH01157428U (en:Method) | 1988-04-07 | 1988-04-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01157428U (en:Method) |
-
1988
- 1988-04-07 JP JP4702588U patent/JPH01157428U/ja active Pending