JPH01156549U - - Google Patents
Info
- Publication number
- JPH01156549U JPH01156549U JP1988052409U JP5240988U JPH01156549U JP H01156549 U JPH01156549 U JP H01156549U JP 1988052409 U JP1988052409 U JP 1988052409U JP 5240988 U JP5240988 U JP 5240988U JP H01156549 U JPH01156549 U JP H01156549U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- suction
- exposure
- suctions
- contracted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988052409U JPH01156549U (enExample) | 1988-04-19 | 1988-04-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988052409U JPH01156549U (enExample) | 1988-04-19 | 1988-04-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01156549U true JPH01156549U (enExample) | 1989-10-27 |
Family
ID=31278407
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988052409U Pending JPH01156549U (enExample) | 1988-04-19 | 1988-04-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01156549U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04290455A (ja) * | 1991-03-19 | 1992-10-15 | Hitachi Electron Eng Co Ltd | ウエハのプリアライメント方式 |
-
1988
- 1988-04-19 JP JP1988052409U patent/JPH01156549U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04290455A (ja) * | 1991-03-19 | 1992-10-15 | Hitachi Electron Eng Co Ltd | ウエハのプリアライメント方式 |