JPH01156441U - - Google Patents
Info
- Publication number
- JPH01156441U JPH01156441U JP5213988U JP5213988U JPH01156441U JP H01156441 U JPH01156441 U JP H01156441U JP 5213988 U JP5213988 U JP 5213988U JP 5213988 U JP5213988 U JP 5213988U JP H01156441 U JPH01156441 U JP H01156441U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- component
- opening
- leak
- disposed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 5
- 238000012856 packing Methods 0.000 claims description 2
- 238000005086 pumping Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
Landscapes
- Examining Or Testing Airtightness (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5213988U JPH01156441U (pl) | 1988-04-20 | 1988-04-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5213988U JPH01156441U (pl) | 1988-04-20 | 1988-04-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01156441U true JPH01156441U (pl) | 1989-10-27 |
Family
ID=31278147
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5213988U Pending JPH01156441U (pl) | 1988-04-20 | 1988-04-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01156441U (pl) |
-
1988
- 1988-04-20 JP JP5213988U patent/JPH01156441U/ja active Pending
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