JPH01155252U - - Google Patents

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Publication number
JPH01155252U
JPH01155252U JP5100788U JP5100788U JPH01155252U JP H01155252 U JPH01155252 U JP H01155252U JP 5100788 U JP5100788 U JP 5100788U JP 5100788 U JP5100788 U JP 5100788U JP H01155252 U JPH01155252 U JP H01155252U
Authority
JP
Japan
Prior art keywords
charged particle
particle beam
analysis
slit
entrance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5100788U
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English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5100788U priority Critical patent/JPH01155252U/ja
Publication of JPH01155252U publication Critical patent/JPH01155252U/ja
Pending legal-status Critical Current

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  • Electron Tubes For Measurement (AREA)
JP5100788U 1988-04-15 1988-04-15 Pending JPH01155252U (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5100788U JPH01155252U (cs) 1988-04-15 1988-04-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5100788U JPH01155252U (cs) 1988-04-15 1988-04-15

Publications (1)

Publication Number Publication Date
JPH01155252U true JPH01155252U (cs) 1989-10-25

Family

ID=31277036

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5100788U Pending JPH01155252U (cs) 1988-04-15 1988-04-15

Country Status (1)

Country Link
JP (1) JPH01155252U (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2525384A3 (en) * 2011-05-19 2013-08-28 FEI Company Method and structure for controlling magnetic field distributions in an ExB wien filter

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62243231A (ja) * 1986-04-15 1987-10-23 Mitsubishi Electric Corp 半導体製造装置
JPS62272437A (ja) * 1986-05-21 1987-11-26 Mitsubishi Electric Corp イオン注入装置用質量分析装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62243231A (ja) * 1986-04-15 1987-10-23 Mitsubishi Electric Corp 半導体製造装置
JPS62272437A (ja) * 1986-05-21 1987-11-26 Mitsubishi Electric Corp イオン注入装置用質量分析装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2525384A3 (en) * 2011-05-19 2013-08-28 FEI Company Method and structure for controlling magnetic field distributions in an ExB wien filter

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