JPH01154461U - - Google Patents
Info
- Publication number
- JPH01154461U JPH01154461U JP5126288U JP5126288U JPH01154461U JP H01154461 U JPH01154461 U JP H01154461U JP 5126288 U JP5126288 U JP 5126288U JP 5126288 U JP5126288 U JP 5126288U JP H01154461 U JPH01154461 U JP H01154461U
- Authority
- JP
- Japan
- Prior art keywords
- teflon
- valve
- channel
- material evaluation
- coatings
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000011156 evaluation Methods 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 2
- 239000004809 Teflon Substances 0.000 claims 2
- 229920006362 Teflon® Polymers 0.000 claims 2
- 230000007547 defect Effects 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000010828 elution Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5126288U JPH01154461U (cs) | 1988-04-14 | 1988-04-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5126288U JPH01154461U (cs) | 1988-04-14 | 1988-04-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01154461U true JPH01154461U (cs) | 1989-10-24 |
Family
ID=31277291
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5126288U Pending JPH01154461U (cs) | 1988-04-14 | 1988-04-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01154461U (cs) |
-
1988
- 1988-04-14 JP JP5126288U patent/JPH01154461U/ja active Pending
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