JPH01147272U - - Google Patents

Info

Publication number
JPH01147272U
JPH01147272U JP4283188U JP4283188U JPH01147272U JP H01147272 U JPH01147272 U JP H01147272U JP 4283188 U JP4283188 U JP 4283188U JP 4283188 U JP4283188 U JP 4283188U JP H01147272 U JPH01147272 U JP H01147272U
Authority
JP
Japan
Prior art keywords
evaporation source
shutter
growth chamber
opening
shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4283188U
Other languages
English (en)
Japanese (ja)
Other versions
JPH057252Y2 (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4283188U priority Critical patent/JPH057252Y2/ja
Publication of JPH01147272U publication Critical patent/JPH01147272U/ja
Application granted granted Critical
Publication of JPH057252Y2 publication Critical patent/JPH057252Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP4283188U 1988-03-30 1988-03-30 Expired - Lifetime JPH057252Y2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4283188U JPH057252Y2 (en:Method) 1988-03-30 1988-03-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4283188U JPH057252Y2 (en:Method) 1988-03-30 1988-03-30

Publications (2)

Publication Number Publication Date
JPH01147272U true JPH01147272U (en:Method) 1989-10-11
JPH057252Y2 JPH057252Y2 (en:Method) 1993-02-24

Family

ID=31269235

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4283188U Expired - Lifetime JPH057252Y2 (en:Method) 1988-03-30 1988-03-30

Country Status (1)

Country Link
JP (1) JPH057252Y2 (en:Method)

Also Published As

Publication number Publication date
JPH057252Y2 (en:Method) 1993-02-24

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