JPH01147273U - - Google Patents
Info
- Publication number
- JPH01147273U JPH01147273U JP4441588U JP4441588U JPH01147273U JP H01147273 U JPH01147273 U JP H01147273U JP 4441588 U JP4441588 U JP 4441588U JP 4441588 U JP4441588 U JP 4441588U JP H01147273 U JPH01147273 U JP H01147273U
- Authority
- JP
- Japan
- Prior art keywords
- growth chamber
- substrate holder
- molecular beam
- beam epitaxy
- growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000008020 evaporation Effects 0.000 claims description 3
- 238000001704 evaporation Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 238000010521 absorption reaction Methods 0.000 claims description 2
- 238000001451 molecular beam epitaxy Methods 0.000 claims 2
- 239000000463 material Substances 0.000 claims 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4441588U JPH057253Y2 (en:Method) | 1988-03-31 | 1988-03-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4441588U JPH057253Y2 (en:Method) | 1988-03-31 | 1988-03-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01147273U true JPH01147273U (en:Method) | 1989-10-11 |
| JPH057253Y2 JPH057253Y2 (en:Method) | 1993-02-24 |
Family
ID=31270774
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4441588U Expired - Lifetime JPH057253Y2 (en:Method) | 1988-03-31 | 1988-03-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH057253Y2 (en:Method) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2024145030A (ja) | 2023-03-31 | 2024-10-15 | ルネサスエレクトロニクス株式会社 | 半導体装置、時間計測方法及び時間計測プログラム |
-
1988
- 1988-03-31 JP JP4441588U patent/JPH057253Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH057253Y2 (en:Method) | 1993-02-24 |