JPH01147262A - Helium refrigerator - Google Patents
Helium refrigeratorInfo
- Publication number
- JPH01147262A JPH01147262A JP30714287A JP30714287A JPH01147262A JP H01147262 A JPH01147262 A JP H01147262A JP 30714287 A JP30714287 A JP 30714287A JP 30714287 A JP30714287 A JP 30714287A JP H01147262 A JPH01147262 A JP H01147262A
- Authority
- JP
- Japan
- Prior art keywords
- compressor
- helium
- cooled
- refrigerant
- heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000001307 helium Substances 0.000 title claims abstract description 45
- 229910052734 helium Inorganic materials 0.000 title claims abstract description 45
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 title claims abstract description 45
- 239000007789 gas Substances 0.000 claims abstract description 23
- 238000001816 cooling Methods 0.000 claims abstract description 14
- 239000003507 refrigerant Substances 0.000 claims abstract description 14
- 238000005057 refrigeration Methods 0.000 claims description 21
- 230000000694 effects Effects 0.000 claims description 5
- 238000013021 overheating Methods 0.000 abstract description 2
- 239000003990 capacitor Substances 0.000 abstract 1
- 230000006835 compression Effects 0.000 description 6
- 238000007906 compression Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 230000020169 heat generation Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- PXBRQCKWGAHEHS-UHFFFAOYSA-N dichlorodifluoromethane Chemical compound FC(F)(Cl)Cl PXBRQCKWGAHEHS-UHFFFAOYSA-N 0.000 description 1
- 235000019404 dichlorodifluoromethane Nutrition 0.000 description 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明はヘリウムガスを冷媒として用い、極低温を発生
させるな−めに使用する冷凍装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a refrigeration system that uses helium gas as a refrigerant to generate extremely low temperatures.
□□ １ −
〔発明の概要〕
本発明は、圧縮機に吸入される低圧のヘリウムガスの温
度を低１させて圧ｌｌｌｉ機の耐久性を向上させるもの
である。□□ 1 - [Summary of the Invention] The present invention improves the durability of a compressor by lowering the temperature of low-pressure helium gas taken into a compressor.
ヘリウムはその比熱比Ｋが１．６６０であり、室内の空
調、冷蔵庫等に使用されている冷凍装置に用いられてい
るフロン１２ （Ｋ＝１．１３６ ＞ ヤフロン２２
（Ｋ＝１．１８４ ）よりも比熱比が大きいなめ、クラ
イオポンプ（低温真空ポンプ）等の極低温を発生させる
装置に用いられる場合、圧縮による発熱がフロン１２等
の場合よりも非常に高くなる。Helium has a specific heat ratio K of 1.660, and is used in refrigeration equipment used in indoor air conditioners and refrigerators.
(K = 1.184), and when used in equipment that generates extremely low temperatures such as cryopumps (low-temperature vacuum pumps), the heat generated by compression will be much higher than in the case of Freon 12, etc. .
すなわち、圧縮による発熱は次式で表わされる。That is, heat generation due to compression is expressed by the following equation.
但し、Ｔ ＝圧縮前の温度、Ｔ２−圧縮発熱後の温度、
Ｐｌ−圧縮前の圧力、Ｐ２−圧縮後の圧力、Ｋ−比熱比
とする。However, T = temperature before compression, T2 - temperature after compression heat generation,
Let Pl be the pressure before compression, P2 be the pressure after compression, and K be the specific heat ratio.
たとえば、’ｒ１＝２９８°に、Ｐ１＝５ｋｇ／ｃｄａ
ｂｓ 、 Ｐ２＝ ２０ ｋｑ ／ｃｉａｂｓとして計
算すると、フロンガスの場合は’ｒ ２’ ＝ ３５２
°Ｋ （−５４℃）となるのに対し、ヘリウムガスの場
合はＴ２ −５１７°Ｋ（＝２１９℃）と非常に高くな
る。このため、ヘリウムガスを圧縮する圧縮機はその高
温によってやはり高温となる。For example, for 'r1=298°, P1=5kg/cda
bs, P2 = 20 kq / ciabs, in case of fluorocarbon gas, 'r 2' = 352
°K (-54 °C), whereas in the case of helium gas, T2 is extremely high at -517 °K (=219 °C). Therefore, the compressor that compresses helium gas becomes hot due to its high temperature.
また、ヘリウムガスは熱伝導性が良いので、冷凍装置の
膨張機で断熱膨脂して極低温（１０〜１００°Ｋ）とな
っても、循環経路を移動中に周囲から熱を吸収して温度
上昇し、圧縮機の吸入口直前ではほぼ室温となってしま
うために圧縮機を冷却する能力は非常に小さい。In addition, helium gas has good thermal conductivity, so even if it is adiabatically expanded in the expander of a refrigeration equipment and reaches extremely low temperatures (10 to 100°K), it absorbs heat from the surroundings while moving through the circulation path. The temperature rises and reaches almost room temperature just before the compressor suction port, so the ability to cool the compressor is very small.
このようなことから従来のヘリウム冷凍装置においては
、圧縮機の耐久性を向上させるなめに圧縮機の冷却を行
なっている。その一つの方法は、圧縮機の周囲に水冷パ
イプを巻付けて水冷する方法である。しかしながらこの
方法は水冷パイプを圧縮機に密着させて巻付けることが
難しく、熱伝導効率が低いために冷却効率か低い。空冷
を用いてもその冷却効果には限界がある。For this reason, in conventional helium refrigeration systems, the compressor is cooled in order to improve the durability of the compressor. One method is to wrap a water-cooled pipe around the compressor and cool it with water. However, in this method, it is difficult to tightly wrap the water cooling pipe around the compressor, and the cooling efficiency is low because the heat conduction efficiency is low. Even when air cooling is used, there are limits to its cooling effect.
他の方法としては、圧縮機内の潤滑冷却油を外部に引出
し、油を冷却した後圧縮機の吸入口に戻すことにより圧
縮機を冷却する方法がある。しかしながらこの方法はＪ
圧縮機に追加工か必要でこれが難しく、さらに冷媒カス
中に油が混じって体積効率が低下するという問題点があ
る。Another method is to cool the compressor by drawing the lubricating cooling oil inside the compressor to the outside, cooling the oil, and then returning it to the suction port of the compressor. However, this method
This is difficult as it requires additional work on the compressor, and there is also the problem that oil gets mixed into the refrigerant scum, reducing volumetric efficiency.
そこで、本発明は上記問題点を解決するため、ヘリウム
ガスを冷媒として用い、冷却作用を終えて循環により戻
ってきた低圧のヘリウムガスを圧縮により高圧にして再
び送り出す圧縮機を備えた冷凍装置において、前記戻っ
てきた低圧のヘリウムガスを前記圧縮機に圧縮させる前
にヘリウムガスを冷却する補助冷凍機を設ける構成とし
たものである。Therefore, in order to solve the above-mentioned problems, the present invention provides a refrigeration system that uses helium gas as a refrigerant and is equipped with a compressor that compresses the low-pressure helium gas returned by circulation after the cooling effect to high pressure and sends it out again. , an auxiliary refrigerator is provided for cooling the returned low-pressure helium gas before it is compressed by the compressor.
このような構成のヘリウム冷凍装置によれば、低圧、の
ヘリウムガスを冷却してから圧縮機に吸入させることに
より、ヘリウムガスの低温で圧縮機を冷却することがて
きるため、ａＳＳの耐久性を向上させることができる。According to a helium refrigeration system with such a configuration, by cooling the low-pressure helium gas and then inhaling it into the compressor, the compressor can be cooled with the low temperature of the helium gas, which improves the durability of the aSS. can be improved.
以下、本発明の実施例について図面に基づいて説明する
。図面は本発明によるヘリウム冷凍装置の一実施例を示
す図である。Embodiments of the present invention will be described below based on the drawings. The drawing shows an embodiment of a helium refrigeration system according to the present invention.
図において、実線で示す配管１で連結された循環系統は
ヘリウム冷凍装Ｗ’ １．０を示す。すなわち、ヘリウ
ム冷凍装置１０において、２は圧縮機、３はコンデンサ
、５は油分離器、６は膨張機である。In the figure, the circulation system connected by piping 1 shown by a solid line indicates a helium refrigeration system W' 1.0. That is, in the helium refrigeration system 10, 2 is a compressor, 3 is a condenser, 5 is an oil separator, and 6 is an expander.
冷媒としてはヘリウムガスが用いられ、配管１中を矢印
方向に循環して膨張機６において冷却作用を行なうよう
になっている。すなわち膨張機６には極低温発生部７が
設けられており、この極低温発生部７を極低温にするこ
とによりたとえば前記クライオポンプを作動させること
かできる。Helium gas is used as the refrigerant, and is circulated in the direction of the arrow in the pipe 1 to perform a cooling action in the expander 6. That is, the expander 6 is provided with a cryogenic temperature generating section 7, and by making the cryogenic temperature generating section 7 extremely low temperature, for example, the cryopump can be operated.
ヘリウム冷凍装Ｍｌ １０の圧縮機２と膨張機６との間
の配管１の圧縮機２寄りの途中には、コンデンサあるい
は２重管等の熱交換器８が設けられている。一方、ヘリ
ウム冷凍装置１０の隣接部には破線で示された補助冷凍
［１２が設けられており、コノ補助冷凍８１２は、小型
圧ｗＡ８１３、ヘリウム冷凍装置１０のコンデンサ３と
近接するコンデンサ１４、減圧弁１５、ヘリウム冷凍装
置１０と共用する熱交換器８、配管１７とを備えている
。補助冷凍機１２は冷媒としてフロンカスを用いており
、この冷媒が配管１７中を矢印方向に循環する。A heat exchanger 8 such as a condenser or a double pipe is provided in the pipe 1 between the compressor 2 and the expander 6 of the helium refrigeration system Ml 10 near the compressor 2. On the other hand, an auxiliary refrigeration unit 12 is provided adjacent to the helium refrigeration system 10, which is indicated by a broken line. It includes a valve 15, a heat exchanger 8 shared with the helium refrigeration device 10, and piping 17. The auxiliary refrigerator 12 uses freon gas as a refrigerant, and this refrigerant circulates in the pipe 17 in the direction of the arrow.
補助冷凍機１２の小型圧縮ｖＡ１３から吐出された高圧
のフロンカスは、コンデンサ１４においてファン１６に
より冷却されて高圧冷媒となる。The high-pressure freon gas discharged from the small compressor vA13 of the auxiliary refrigerator 12 is cooled by the fan 16 in the condenser 14 and becomes high-pressure refrigerant.
この高圧冷媒は配管１７中を矢印方向にに送られて減圧
弁１５を通過することにより低圧、低温の−６＝
冷媒となり、さらに送られて熱交換器８においてヘリウ
ム冷凍装置１０の配管１内のヘリウムガスから熱を奪っ
て小型圧縮機１３に戻される。This high-pressure refrigerant is sent in the direction of the arrow through the pipe 17, passes through the pressure reducing valve 15, becomes a low-pressure, low-temperature refrigerant, and is further sent to the heat exchanger 8 in the pipe 1 of the helium refrigeration system 10. Heat is removed from the helium gas and returned to the small compressor 13.
このように、熱交換器８においてヘリウム冷凍装置１０
のヘリウムガスは熱を奪われて約０°Ｃ付近まで冷却さ
れるため、この冷却・されたヘリウムガスが圧縮機２に
吸入されることにより圧縮機２は冷却される。ヘリウム
ガスは圧縮機２内の発熱するシリングやロータを直接冷
却するために冷却効率が良く、圧縮機２の過熱を有効に
防止することによりその耐久性を向上させることかでき
る。In this way, the helium refrigeration device 10 in the heat exchanger 8
The helium gas is deprived of heat and cooled to around 0°C, so the compressor 2 is cooled by sucking this cooled helium gas into the compressor 2. Helium gas has good cooling efficiency because it directly cools the heat-generating ring and rotor in the compressor 2, and can effectively prevent the compressor 2 from overheating, thereby improving its durability.
なお、ヘリウム冷凍装ｆｉｏの極低温発生部７はクライ
オポンプのほか、Ｘ線センサ、赤外線センサ、あるいは
超電導装置等に用いることもできる。Note that the cryogenic temperature generation section 7 of the helium refrigeration system fio can be used not only for a cryopump but also for an X-ray sensor, an infrared sensor, a superconducting device, or the like.
以上説明したように本発明によれは、ヘリウム冷凍装置
の圧縮機の追加工を必要とせす、また同圧縮機の体積効
率を低下させることもなく、効率的に同圧縮機を冷却す
ることができるため、ヘリウム冷凍装置の圧ｍ機の耐久
性を向上させることかできる。As explained above, according to the present invention, it is possible to efficiently cool the compressor of a helium refrigeration system without requiring additional work on the compressor or reducing the volumetric efficiency of the compressor. Therefore, the durability of the compressor of the helium refrigeration system can be improved.
図面は本発明によるヘリウム冷凍装置の一実施例を示す
全体構成図である。
１．１７・・・配管
２・・・・・・圧縮機
３．１４・・・コンデンサ
５・・・・・・油分離器
６・・・・・・膨張機
７・・・・・・極低温発生部
８・・・・・・熱交換器
１０・・・ヘリウム冷凍装置
１２・・・補助冷凍機
１５・・・減圧弁
１６・・・ファンThe drawing is an overall configuration diagram showing an embodiment of a helium refrigeration apparatus according to the present invention. 1.17... Piping 2... Compressor 3.14... Condenser 5... Oil separator 6... Expander 7... Pole Low temperature generation unit 8... Heat exchanger 10... Helium refrigerator 12... Auxiliary refrigerator 15... Pressure reducing valve 16... Fan
Claims (1)
により戻ってきた低圧のヘリウムガスを圧縮により高圧
にして再び送り出す圧縮機を備えた冷凍装置において、
前記戻ってきた低圧のヘリウムガスを前記圧縮機に圧縮
させる前にヘリウムガスを冷却する補助冷凍機を設ける
ことを特徴とするヘリウム冷凍装置。In a refrigeration system that uses helium gas as a refrigerant and is equipped with a compressor that compresses the low-pressure helium gas that has returned through circulation after the cooling effect to high pressure and sends it out again,
A helium refrigeration system characterized in that an auxiliary refrigerator is provided for cooling the returned low-pressure helium gas before the compressor compresses the helium gas.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30714287A JPH01147262A (en) | 1987-12-04 | 1987-12-04 | Helium refrigerator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30714287A JPH01147262A (en) | 1987-12-04 | 1987-12-04 | Helium refrigerator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01147262A true JPH01147262A (en) | 1989-06-08 |
Family
ID=17965536
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP30714287A Pending JPH01147262A (en) | 1987-12-04 | 1987-12-04 | Helium refrigerator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01147262A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0461263U (en) * | 1990-10-01 | 1992-05-26 | ||
| JP2010230308A (en) * | 2010-07-19 | 2010-10-14 | Aisin Seiki Co Ltd | Pulse tube refrigerating machine |
-
1987
- 1987-12-04 JP JP30714287A patent/JPH01147262A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0461263U (en) * | 1990-10-01 | 1992-05-26 | ||
| JP2010230308A (en) * | 2010-07-19 | 2010-10-14 | Aisin Seiki Co Ltd | Pulse tube refrigerating machine |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| RU94030805A (en) | Method of control of pressure at delivery side in device with transcriptional cycle of steam compression | |
| US5555745A (en) | Refrigeration system | |
| WO2016058365A1 (en) | Air conditioning unit and operation method | |
| US5540061A (en) | Refrigerator | |
| US6385995B1 (en) | Apparatus having a refrigeration circuit | |
| JPH01147262A (en) | Helium refrigerator | |
| JP2007051788A (en) | Refrigerating device | |
| JPH0429115Y2 (en) | ||
| JP2001091066A (en) | Power-saving noise-proof refrigerating machine | |
| CN219139306U (en) | Cooling system for self-cooling of industrial air conditioner compressor | |
| US20170045273A1 (en) | Cryogenic refrigeration system | |
| JPH08145496A (en) | Refrigerator | |
| RU2447377C1 (en) | Refrigerating plant | |
| KR970009803B1 (en) | Refrigerating cycle apparatus | |
| JPH06272992A (en) | Air conditioner | |
| JPH11257817A (en) | Cooling system | |
| WO2020084725A1 (en) | Air-refrigerant type refrigeration system | |
| CN116066920A (en) | Refrigerating system and method | |
| JPS6158745B2 (en) | ||
| SU1277441A1 (en) | Device for cooling electronic equipment | |
| JP3242143B2 (en) | Ammonia refrigerator | |
| JPS6026259A (en) | Heat pump device | |
| JPH0339864A (en) | Refrigerating compressor cryostatic | |
| JPH06273008A (en) | Air conditioning apparatus | |
| KR200204568Y1 (en) | Air compression turborefrigerator operating as an open cycle, ACTR |