JPH01146554U - - Google Patents

Info

Publication number

JPH01146554U

JPH01146554U JP4307188U JP4307188U JPH01146554U JP H01146554 U JPH01146554 U JP H01146554U JP 4307188 U JP4307188 U JP 4307188U JP 4307188 U JP4307188 U JP 4307188U JP H01146554 U JPH01146554 U JP H01146554U

Authority

JP

Japan

Prior art keywords

region

conductivity type

semiconductor substrate

impurity

substrate

Prior art date

1988-03-30

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
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• 239000012535 impurity Substances 0.000 claims description 9
• 239000004065 semiconductor Substances 0.000 claims description 8
• 239000000758 substrate Substances 0.000 claims description 8
• 230000000295 complement effect Effects 0.000 claims 1
• 239000003990 capacitor Substances 0.000 description 3
• 238000010586 diagram Methods 0.000 description 3
• 239000010410 layer Substances 0.000 description 3
• XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
• 229910052782 aluminium Inorganic materials 0.000 description 1
• 239000011229 interlayer Substances 0.000 description 1
• 230000003071 parasitic effect Effects 0.000 description 1