JPH01146235A - Cathode composition of x-ray tube and its manufacture - Google Patents
Cathode composition of x-ray tube and its manufactureInfo
- Publication number
- JPH01146235A JPH01146235A JP30529087A JP30529087A JPH01146235A JP H01146235 A JPH01146235 A JP H01146235A JP 30529087 A JP30529087 A JP 30529087A JP 30529087 A JP30529087 A JP 30529087A JP H01146235 A JPH01146235 A JP H01146235A
- Authority
- JP
- Japan
- Prior art keywords
- cathode
- filament
- legs
- ray tube
- welding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 9
- 238000003466 welding Methods 0.000 claims abstract description 27
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims abstract description 6
- 229910052707 ruthenium Inorganic materials 0.000 claims abstract description 6
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 6
- 229910052750 molybdenum Inorganic materials 0.000 claims description 6
- 239000011733 molybdenum Substances 0.000 claims description 6
- 238000007747 plating Methods 0.000 claims description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 6
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 6
- 229910052721 tungsten Inorganic materials 0.000 claims description 6
- 239000010937 tungsten Substances 0.000 claims description 6
- 229910052697 platinum Inorganic materials 0.000 claims description 3
- 229910052703 rhodium Inorganic materials 0.000 claims description 3
- 239000010948 rhodium Substances 0.000 claims description 3
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 claims description 3
- 229910001220 stainless steel Inorganic materials 0.000 claims description 3
- 239000010935 stainless steel Substances 0.000 claims description 3
- 238000003825 pressing Methods 0.000 abstract description 2
- 238000005520 cutting process Methods 0.000 abstract 3
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000003745 diagnosis Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Abstract
Description
【発明の詳細な説明】 [発明の目的] (産業上の利用分野) この発明は、X線管の陰極構体の製造方法に関する。[Detailed description of the invention] [Purpose of the invention] (Industrial application field) The present invention relates to a method of manufacturing a cathode assembly for an X-ray tube.
(従来の技術)
一般に、X線管は例えばX線診断として医療用などに利
用されているが、固定陽極型X線管は、真空外囲器内に
陽極構体と陰極構体とが対向して配設されている。(Prior Art) Generally, X-ray tubes are used for medical purposes such as X-ray diagnosis, but fixed anode X-ray tubes have an anode structure and a cathode structure facing each other in a vacuum envelope. It is arranged.
そして陰極構体は、従来、略長方形の集束溝を有するカ
ップ状集束電極内に、第4図に示すようなタングステン
製の螺旋状陰極フィラメント15が設けられ、この陰極
フィラメント15の両端脚部16.17がそれぞれモリ
ブデン製又は鉄製のフィラメント支持棒11.12に固
着されている。Conventionally, in the cathode structure, a spiral cathode filament 15 made of tungsten as shown in FIG. 4 is provided in a cup-shaped focusing electrode having a substantially rectangular focusing groove. 17 are respectively fixed to filament support rods 11 and 12 made of molybdenum or iron.
ところで、陰極フィラメント15と集束溝との相対位置
は電子ビームの集束特性に強い影響を与えるので、高精
度に組み立てられる必要がある。By the way, since the relative position of the cathode filament 15 and the focusing groove has a strong influence on the focusing characteristics of the electron beam, it is necessary to assemble the cathode filament 15 with high precision.
一方、陰極フィラメント15とフィラメント支持棒11
.12との溶接は、両者が互いに溶接し難い金属材料で
あるため、溶接時に精度が狂い易い。On the other hand, the cathode filament 15 and the filament support rod 11
.. When welding with 12, since both are metal materials that are difficult to weld to each other, the accuracy is likely to be lost during welding.
そこで、従来は上記のようにフィラメント支持棒11.
12の先端部に軸方向に沿う割溝13.14を形成して
おき、この割溝13.14に陰極フィラメント15の両
端脚部16.17を挿入して矢印で示すように溶接電極
(図示せず)で挾み、加圧しながら点溶接を数箇所行な
って、電気的及び機械的に結合する構造が採られている
。Therefore, conventionally, the filament support rod 11.
A split groove 13.14 along the axial direction is formed at the tip of the cathode filament 12, and both end legs 16.17 of the cathode filament 15 are inserted into the split groove 13.14, and the welding electrode (Fig. (not shown), and spot welding is performed at several locations while applying pressure to connect electrically and mechanically.
(発明が解決しようとする問題点)
ところが、上記のような従来の構造及び製造方法では、
溶接時に一対の溶接電極の各接触点を結ぶ線上に、常に
陰極フィラメント15の両端脚部16.17の中心が位
置するとは限らない。このため脚部16.17に捩じれ
力等の応力が作用し、陰極フィラメント15の螺旋部特
にA部が曲がり易い。又、フィラメント支持棒11.1
2の中心軸と脚部16.17の中心がずれてしまったり
、或いは割溝13.14内での接触抵抗に部分的違いが
生じて溶接強度が乱れ、極端な場合は脆くなって折れが
生じてしまう。(Problems to be solved by the invention) However, in the conventional structure and manufacturing method as described above,
During welding, the centers of the legs 16 and 17 at both ends of the cathode filament 15 are not always located on the line connecting the contact points of the pair of welding electrodes. For this reason, stress such as torsional force acts on the leg portions 16 and 17, and the helical portion of the cathode filament 15, particularly the portion A, tends to bend. Also, the filament support rod 11.1
2 and the center of the legs 16.17 may be misaligned, or there may be local differences in contact resistance within the grooves 13.14, resulting in disturbances in the welding strength, and in extreme cases, the welding may become brittle and break. It will happen.
このように、従来の構造では、組み立てが困難で且つ高
精度の陰極構体が得難い不都合がある。As described above, the conventional structure has disadvantages in that it is difficult to assemble and it is difficult to obtain a highly accurate cathode structure.
この発明は、溶接が容易にして、且つ溶接強度が優れ、
高精度の陰極構体を組み立てることが出来るX線管の陰
極構体及びその製造方法を提供することを目的とする。This invention facilitates welding and has excellent welding strength.
An object of the present invention is to provide a cathode structure for an X-ray tube that can assemble a cathode structure with high precision, and a method for manufacturing the same.
[発明の構成コ
(問題点を解決するための手段)
この発明は、集束溝を有する集束電極内に上記集束溝に
対応してタングステン製の螺旋状陰極フィラメントが設
けられ、この陰極フィラメントの両端脚部が一対のモリ
ブデン製のフィラメント支持棒に固着されてなるX線管
の陰極構体において、上記一対のフィラメント支持棒は
平坦部を有し、この平坦部にメッキが施された凹状溝が
設けられ、この凹状溝に上記陰極フィラメントの脚部が
嵌合されると共に、タブレットにより押圧され溶接固着
されてなるX線管の陰極構体である。そして、上記メッ
キはルテニウム又は白金又はロジウムであり、上記タブ
レットはステンレス製(特に5us304Lが良い)で
ある。[Structure of the Invention (Means for Solving Problems)] This invention provides a focusing electrode having a focusing groove, in which a spiral cathode filament made of tungsten is provided corresponding to the focusing groove, and both ends of the cathode filament are In an X-ray tube cathode structure in which the legs are fixed to a pair of filament support rods made of molybdenum, the pair of filament support rods have a flat portion, and a plated concave groove is provided in the flat portion. This is a cathode structure for an X-ray tube, in which the legs of the cathode filament are fitted into the concave grooves, and are pressed by a tablet and fixed by welding. The plating is ruthenium, platinum, or rhodium, and the tablet is made of stainless steel (5us304L is particularly good).
又、この発明は、タングステン製の螺旋状陰極フィラメ
ントの両端脚部を一対のモリブデン製のフィラメント支
持棒に固着するX線管の陰極構体の製造方法において、
上記一対のフィラメント支持棒に平坦部を形成し、更に
この平坦部に凹状溝を設けてメッキを施し、この凹状溝
に上記陰極フィラメントの脚部を嵌合すると共に、両脚
部に股がる一体型タブレットにより押圧し、溶接して固
着した後、上記一体型タブレットの不用部分を除去する
X線管の陰極構体の製造方法である。The present invention also provides a method for manufacturing a cathode assembly for an X-ray tube in which both end legs of a spiral cathode filament made of tungsten are fixed to a pair of filament support rods made of molybdenum.
A flat portion is formed on the pair of filament support rods, and a concave groove is provided in the flat portion and plated. This is a method of manufacturing a cathode structure for an X-ray tube, in which unnecessary parts of the integrated tablet are removed after the integrated tablet is pressed and fixed by welding.
(作用)
この発明によれば、陰極フィラメントの曲がりなどの変
形が生じ難く、溶接性が優れ、且つ組立て容易にして高
精度の陰極構体が得られる。(Function) According to the present invention, it is possible to obtain a highly accurate cathode structure in which deformation such as bending of the cathode filament is difficult to occur, excellent weldability is achieved, and assembly is easy.
(実施例)
以下、図面を参照して、この発明の一実施例を詳細に説
明する。(Example) Hereinafter, an example of the present invention will be described in detail with reference to the drawings.
この発明によるX線管の陰極構体は、第1図乃至第3図
に示すように構成され、従来例(第4図)と同一箇所に
は同一符号を付すことにする。The cathode structure of the X-ray tube according to the present invention is constructed as shown in FIGS. 1 to 3, and the same parts as in the conventional example (FIG. 4) are given the same reference numerals.
即ち、第3図は陰極構体の全体を示す平面図であり、大
小の集束溝22.23を有する集束電極21内に、集束
溝22.23に対応してそれぞれ陰極フィラメント15
.18が設けられている。That is, FIG. 3 is a plan view showing the entire cathode structure, in which cathode filaments 15 are provided in the focusing electrode 21 having large and small focusing grooves 22,23 corresponding to the focusing grooves 22,23.
.. 18 are provided.
この陰極フィラメント15.18は、第1図(a)に示
すようにタングステン製の螺旋状にして、両端が折曲げ
られて脚部16.17が形成されている(但し、第1図
では便宜上陰極フィラメント15の場合のみ図示)。こ
の脚部16.17はそれぞれモリブデン製の一対のフィ
シ”メント支持棒24.25に固着されるが、第2図(
b)に示すように、この発明では一対のフィラメント支
持棒24.25の先端部31近くには平坦部となる切欠
部33及びこれに続く斜面32がそれぞれ形成されてい
る。そして、これら両フィラメント支持棒24.25の
切欠部33は同一平面上に並んでおり、而もこの切欠部
33にはフィラメント支持棒24.25の軸に沿って、
例えば断面円弧状の凹状溝34がそれぞれ設けられ、こ
の凹状溝34にルテニウムのメッキが施されている。As shown in FIG. 1(a), this cathode filament 15.18 is made of tungsten and made into a spiral shape, and both ends are bent to form leg portions 16.17. Only the case of cathode filament 15 is shown). The legs 16, 17 are each fixed to a pair of fixture support rods 24, 25 made of molybdenum, as shown in FIG.
As shown in b), in the present invention, a notch 33 serving as a flat portion and a slope 32 continuing thereto are formed near the tip portions 31 of the pair of filament support rods 24 and 25, respectively. The notches 33 of both filament support rods 24.25 are arranged on the same plane, and the notches 33 include the following along the axis of the filament support rods 24.25.
For example, concave grooves 34 each having an arcuate cross section are provided, and the concave grooves 34 are plated with ruthenium.
このメッキが施された凹状溝34には、陰極フィラメン
ト15の脚部16が嵌合されると共に、ステンレス製の
一体型タブレット35により押圧され、例えば抵抗溶接
により固着されている。第1図(a)のX印は、溶接箇
所を示す。The leg portion 16 of the cathode filament 15 is fitted into the plated concave groove 34, and is pressed by an integrated tablet 35 made of stainless steel and fixed by, for example, resistance welding. The X marks in FIG. 1(a) indicate welding locations.
尚、上記説明及び第2図(a)、(b)は陰極フィラメ
ント15の一方の脚部16と一方のフィラメント支持棒
24についてであるが、他方の脚部17とフィラメント
支持棒25についても、全く同様である。又、陰極フィ
ラメント18の場合も、陰極フィラメント15の場合と
全く同様であり、説明を省略する。第3図の符号26.
27は、陰極フィラメント18が固着されているフィラ
メント支持棒を示している。The above description and FIGS. 2(a) and 2(b) refer to one leg 16 of the cathode filament 15 and one filament support rod 24, but the other leg 17 and filament support rod 25 are also It's exactly the same. Further, the case of the cathode filament 18 is also exactly the same as the case of the cathode filament 15, and the explanation thereof will be omitted. Reference numeral 26 in FIG.
27 indicates a filament support rod to which the cathode filament 18 is fixed.
さて、このような陰極構体の製造方法、特に陰極フィラ
メント15をフィラメント支持V%24.25に固着す
る方法について述べると、先ず一対のフィラメント支持
棒24.25のそれぞれ先端部31近くに同一平面に位
置する切欠部33及びこれに続く斜面32を形成する。Now, to describe the method for manufacturing such a cathode structure, especially the method for fixing the cathode filament 15 to the filament support V%24.25, first, the pair of filament support rods 24.25 are placed on the same plane near the tips 31 of each of them. A notch 33 and a slope 32 following the notch 33 are formed.
この切欠部33に、フィラメント支持棒24.25の軸
に沿って、脚部16.17の直径にほぼ等しい直径の例
えば断面円弧状の凹状溝34を設ける。この凹状溝34
の形成には、レーザ加工が適しており、レーザ加工によ
れば、例えば直径0.2mmのような細い陰極フィラメ
ント15の脚部16.17の挿入に対しても、しっくり
入る精度の良い凹状溝34の加工が可能である。A concave groove 34 having a diameter approximately equal to the diameter of the leg 16.17 and having, for example, an arcuate cross section, is provided in this cutout 33 along the axis of the filament support rod 24.25. This concave groove 34
Laser machining is suitable for forming the concave grooves, which can fit snugly into the leg portions 16 and 17 of the cathode filament 15 as thin as 0.2 mm in diameter. 34 types of processing are possible.
次に、このような凹状溝34にルテニウムのメッキを施
す。その後、メッキを施した凹状溝34に、陰極フィラ
メント15の脚部16.17を嵌合し、更にこの上から
第2図(C)に示すような両脚部16.17に股がる厚
さ50μm程度の一体型タブレット35で押圧する。Next, such concave grooves 34 are plated with ruthenium. Thereafter, the leg portions 16.17 of the cathode filament 15 are fitted into the plated concave groove 34, and the thickness of the cathode filament 15 is then extended from above to the leg portions 16.17 as shown in FIG. 2(C). Press with an integrated tablet 35 of about 50 μm.
そして、第1図(b)の矢印で示すように、この一体型
タブレット35とフィラメント支持棒24とを一対の溶
接電極(図示せず)で挾んで、抵抗溶接により固着する
。第1図(a)のX印が溶接箇所である。Then, as shown by the arrow in FIG. 1(b), the integrated tablet 35 and the filament support rod 24 are sandwiched between a pair of welding electrodes (not shown) and fixed by resistance welding. The X mark in FIG. 1(a) is the welding location.
最後に、一体型タブレット35のくびれ部B1Cを切断
して、不用部分を除去する。Finally, the constricted portion B1C of the integrated tablet 35 is cut to remove the unnecessary portion.
尚、陰極フィラメント18の場合も、陰極フィラメント
15の場合と全く同様であり、説明を省略する。Incidentally, the case of the cathode filament 18 is also exactly the same as the case of the cathode filament 15, and the explanation thereof will be omitted.
(変形例)
上記実施例では、凹状溝34は断面円弧状であったが、
断面V字状、断面U字状、或いは断面多角形状などであ
っても良い。又、溶接は抵抗溶接に限らず、レーザ溶接
でも良い。(Modification) In the above embodiment, the concave groove 34 had an arcuate cross section;
It may have a V-shaped cross section, a U-shaped cross section, or a polygonal cross section. Further, the welding is not limited to resistance welding, but may also be laser welding.
又、上記実施例では、メッキはルテニウムであったが、
メッキは白金又はロジウムでも良い。Also, in the above example, the plating was ruthenium, but
The plating may be platinum or rhodium.
[発明の効果]
この発明によれば、フィラメント支持棒の平坦部である
切欠部に凹状溝を設けてメッキを施し、この凹状溝に陰
極フィラメントの脚部を1氏合すると共に、両脚部に股
がる一体型タブレットにより押圧し、溶接して固着して
いるので、一体型タブレットを使用することにより、陰
極フィラメントの脚部の溶接の際の局部的応力発生を避
けることが出来る。[Effects of the Invention] According to the present invention, a concave groove is provided in the notch, which is the flat part of the filament support rod, and plating is applied, one leg of the cathode filament is fitted into this concave groove, and both legs are fitted. Since the integrated tablet is pressed and welded together, the use of the integrated tablet avoids the generation of local stress during welding of the legs of the cathode filament.
又、少ない溶接箇所により、陰極フィラメントの抜は等
の事故を防止することが出来る。その結果、陰極フィラ
メントの不所望な曲がりなどの変形が生じる恐れが少な
くなり、高精度の組立てが出来る。Furthermore, since the number of welding points is small, accidents such as the cathode filament coming off can be prevented. As a result, there is less risk of deformation such as undesired bending of the cathode filament, allowing for highly accurate assembly.
更に、一体型タブレットとフィラメント支持棒との溶接
性を良くするために、フィラメント支持棒にメッキを施
しているが、これにより一体型タブレットとフィラメン
ト支持棒は陰極フィラメントの溶接の際の拡散剤として
も良く働き、溶接性向上に非常に役立つ。Furthermore, in order to improve the weldability between the integrated tablet and the filament support rod, the filament support rod is plated. It also works well and is very useful for improving weldability.
第1図(a)、(b)、(c)はこの発明の一実施例に
係るX線管の陰極構体の要部を示し、(a)は正面図、
(b)は側面図、(C)は(b)のA−A’線に沿って
切断し矢印方向に見た断面図、第2図(a)、(b)、
(C)は同じく分解して示す斜視図と平面図、第3図は
この発明の一実施例に係るX線管の陰極構体を示す平面
図、第4図は従来のX線管の陰極構体の要部を示す正面
図である。
15.18・・・陰極フィラメント、21・・・集束電
極、22.23・・・集束溝、24.25.26.27
・・・フィラメント支持棒、33・・・切欠部、34・
・・凹状溝、35・・・タブレット。
出願人代理人 弁理士 鈴江武彦
(a)
(b) 第1図
第2図
(転)3図
第4図FIGS. 1(a), (b), and (c) show essential parts of a cathode structure of an X-ray tube according to an embodiment of the present invention, and FIG. 1(a) is a front view;
(b) is a side view, (C) is a sectional view taken along line AA' in (b) and seen in the direction of the arrow, Figures 2 (a), (b),
(C) is an exploded perspective view and a plan view, FIG. 3 is a plan view showing a cathode structure of an X-ray tube according to an embodiment of the present invention, and FIG. 4 is a cathode structure of a conventional X-ray tube. FIG. 15.18... Cathode filament, 21... Focusing electrode, 22.23... Focusing groove, 24.25.26.27
... filament support rod, 33 ... notch, 34.
...concave groove, 35...tablet. Applicant's agent Patent attorney Takehiko Suzue (a) (b) Figure 1 Figure 2 (translated) Figure 3 Figure 4
Claims (3)
てタングステン製の螺旋状陰極フィラメントが設けられ
、この陰極フィラメントの両端脚部が一対のモリブデン
製のフィラメント支持棒に固着されてなるX線管の陰極
構体において、上記一対のフィラメント支持棒は平坦部
を有し、この平坦部にメッキが施された凹状溝が設けら
れ、この凹状溝に上記陰極フィラメントの脚部が嵌合さ
れると共に、タブレットにより押圧され溶接固着されて
なることを特徴とするX線管の陰極構体。(1) A spiral cathode filament made of tungsten is provided in a focusing electrode having a focusing groove in correspondence with the focusing groove, and both end legs of this cathode filament are fixed to a pair of filament support rods made of molybdenum. In the cathode structure of the X-ray tube, the pair of filament support rods have a flat part, a plated concave groove is provided in the flat part, and the leg part of the cathode filament is fitted into the concave groove. What is claimed is: 1. A cathode assembly for an X-ray tube, characterized in that the cathode assembly is pressed by a tablet and fixed by welding.
あり、上記タブレットはステンレス製である特許請求の
範囲第1項記載のX線管の陰極構体。(2) The cathode assembly for an X-ray tube according to claim 1, wherein the plating is ruthenium, platinum, or rhodium, and the tablet is made of stainless steel.
脚部を一対のモリブデン製のフィラメント支持棒に固着
するX線管の陰極構体の製造方法において、 上記一対のフィラメント支持棒に平坦部を形成し、更に
この平坦部に凹状溝を設けてメッキを施し、この凹状溝
に上記陰極フィラメントの脚部を嵌合すると共に、両脚
部に股がる一体型タブレットにより押圧し、溶接して固
着した後、上記一体型タブレットの不用部分を除去する
ことを特徴とするX線管の陰極構体の製造方法。(3) A method for manufacturing an X-ray tube cathode assembly in which both end legs of a spiral cathode filament made of tungsten are fixed to a pair of filament support rods made of molybdenum, wherein a flat portion is formed on the pair of filament support rods, Further, a concave groove is provided in this flat part and plating is applied, and the leg part of the cathode filament is fitted into this concave groove, and after being pressed by an integrated tablet that spans both legs and fixed by welding, A method for manufacturing a cathode assembly for an X-ray tube, comprising removing unnecessary parts of the integrated tablet.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP30529087A JPH01146235A (en) | 1987-12-02 | 1987-12-02 | Cathode composition of x-ray tube and its manufacture |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP30529087A JPH01146235A (en) | 1987-12-02 | 1987-12-02 | Cathode composition of x-ray tube and its manufacture |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01146235A true JPH01146235A (en) | 1989-06-08 |
Family
ID=17943320
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP30529087A Pending JPH01146235A (en) | 1987-12-02 | 1987-12-02 | Cathode composition of x-ray tube and its manufacture |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01146235A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0743356A (en) * | 1993-07-30 | 1995-02-14 | Shimadzu Corp | Thermal conductivity detector |
JP2018113185A (en) * | 2017-01-12 | 2018-07-19 | 東芝電子管デバイス株式会社 | X-ray tube and method of manufacturing X-ray tube |
-
1987
- 1987-12-02 JP JP30529087A patent/JPH01146235A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0743356A (en) * | 1993-07-30 | 1995-02-14 | Shimadzu Corp | Thermal conductivity detector |
JP2018113185A (en) * | 2017-01-12 | 2018-07-19 | 東芝電子管デバイス株式会社 | X-ray tube and method of manufacturing X-ray tube |
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