JPH01146073U - - Google Patents
Info
- Publication number
- JPH01146073U JPH01146073U JP4321488U JP4321488U JPH01146073U JP H01146073 U JPH01146073 U JP H01146073U JP 4321488 U JP4321488 U JP 4321488U JP 4321488 U JP4321488 U JP 4321488U JP H01146073 U JPH01146073 U JP H01146073U
- Authority
- JP
- Japan
- Prior art keywords
- valve
- flow rate
- sliding
- bodies
- valve bodies
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001105 regulatory effect Effects 0.000 claims description 3
Landscapes
- Sliding Valves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4321488U JPH01146073U (ko) | 1988-03-30 | 1988-03-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4321488U JPH01146073U (ko) | 1988-03-30 | 1988-03-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01146073U true JPH01146073U (ko) | 1989-10-06 |
Family
ID=31269620
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4321488U Pending JPH01146073U (ko) | 1988-03-30 | 1988-03-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01146073U (ko) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06272768A (ja) * | 1993-03-16 | 1994-09-27 | Anelva Corp | ゲートバルブ |
| JP2004502105A (ja) * | 2000-06-28 | 2004-01-22 | エムケーエス インスツルメント，インコーポレーテッド | 二重ペンドラム弁アセンブリ |
| WO2008139937A1 (ja) * | 2007-05-08 | 2008-11-20 | Tokyo Electron Limited | バルブおよび該バルブを備えた処理装置 |
-
1988
- 1988-03-30 JP JP4321488U patent/JPH01146073U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06272768A (ja) * | 1993-03-16 | 1994-09-27 | Anelva Corp | ゲートバルブ |
| JP2004502105A (ja) * | 2000-06-28 | 2004-01-22 | エムケーエス インスツルメント，インコーポレーテッド | 二重ペンドラム弁アセンブリ |
| JP4785326B2 (ja) * | 2000-06-28 | 2011-10-05 | エムケーエス インスツルメント，インコーポレーテッド | 二重ペンドラム弁アセンブリ |
| WO2008139937A1 (ja) * | 2007-05-08 | 2008-11-20 | Tokyo Electron Limited | バルブおよび該バルブを備えた処理装置 |