JPH01145991U - - Google Patents

Info

Publication number
JPH01145991U
JPH01145991U JP4322988U JP4322988U JPH01145991U JP H01145991 U JPH01145991 U JP H01145991U JP 4322988 U JP4322988 U JP 4322988U JP 4322988 U JP4322988 U JP 4322988U JP H01145991 U JPH01145991 U JP H01145991U
Authority
JP
Japan
Prior art keywords
bellows
vacuum pump
high vacuum
evacuation
tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4322988U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0519588Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4322988U priority Critical patent/JPH0519588Y2/ja
Publication of JPH01145991U publication Critical patent/JPH01145991U/ja
Application granted granted Critical
Publication of JPH0519588Y2 publication Critical patent/JPH0519588Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP4322988U 1988-03-30 1988-03-30 Expired - Lifetime JPH0519588Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4322988U JPH0519588Y2 (enrdf_load_stackoverflow) 1988-03-30 1988-03-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4322988U JPH0519588Y2 (enrdf_load_stackoverflow) 1988-03-30 1988-03-30

Publications (2)

Publication Number Publication Date
JPH01145991U true JPH01145991U (enrdf_load_stackoverflow) 1989-10-06
JPH0519588Y2 JPH0519588Y2 (enrdf_load_stackoverflow) 1993-05-24

Family

ID=31269635

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4322988U Expired - Lifetime JPH0519588Y2 (enrdf_load_stackoverflow) 1988-03-30 1988-03-30

Country Status (1)

Country Link
JP (1) JPH0519588Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018507531A (ja) * 2014-11-24 2018-03-15 アットキューブ システムズ アーゲー テーブル

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018507531A (ja) * 2014-11-24 2018-03-15 アットキューブ システムズ アーゲー テーブル

Also Published As

Publication number Publication date
JPH0519588Y2 (enrdf_load_stackoverflow) 1993-05-24

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