JPH0371625U - - Google Patents

Info

Publication number
JPH0371625U
JPH0371625U JP13322289U JP13322289U JPH0371625U JP H0371625 U JPH0371625 U JP H0371625U JP 13322289 U JP13322289 U JP 13322289U JP 13322289 U JP13322289 U JP 13322289U JP H0371625 U JPH0371625 U JP H0371625U
Authority
JP
Japan
Prior art keywords
exhaust pipe
bellows
integrated circuit
measuring device
horizontal direction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13322289U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13322289U priority Critical patent/JPH0371625U/ja
Publication of JPH0371625U publication Critical patent/JPH0371625U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Chemical Vapour Deposition (AREA)
JP13322289U 1989-11-15 1989-11-15 Pending JPH0371625U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13322289U JPH0371625U (enrdf_load_stackoverflow) 1989-11-15 1989-11-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13322289U JPH0371625U (enrdf_load_stackoverflow) 1989-11-15 1989-11-15

Publications (1)

Publication Number Publication Date
JPH0371625U true JPH0371625U (enrdf_load_stackoverflow) 1991-07-19

Family

ID=31680633

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13322289U Pending JPH0371625U (enrdf_load_stackoverflow) 1989-11-15 1989-11-15

Country Status (1)

Country Link
JP (1) JPH0371625U (enrdf_load_stackoverflow)

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