JPH0114536B2 - - Google Patents

Info

Publication number
JPH0114536B2
JPH0114536B2 JP55084281A JP8428180A JPH0114536B2 JP H0114536 B2 JPH0114536 B2 JP H0114536B2 JP 55084281 A JP55084281 A JP 55084281A JP 8428180 A JP8428180 A JP 8428180A JP H0114536 B2 JPH0114536 B2 JP H0114536B2
Authority
JP
Japan
Prior art keywords
valve metal
oxide layer
sensing element
metal oxide
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55084281A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5710202A (en
Inventor
Akihiko Yoshida
Atsushi Nishino
Toshuki Yasufuku
Akira Sadamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP8428180A priority Critical patent/JPS5710202A/ja
Publication of JPS5710202A publication Critical patent/JPS5710202A/ja
Publication of JPH0114536B2 publication Critical patent/JPH0114536B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Non-Adjustable Resistors (AREA)
JP8428180A 1980-06-20 1980-06-20 Moisture detector Granted JPS5710202A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8428180A JPS5710202A (en) 1980-06-20 1980-06-20 Moisture detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8428180A JPS5710202A (en) 1980-06-20 1980-06-20 Moisture detector

Publications (2)

Publication Number Publication Date
JPS5710202A JPS5710202A (en) 1982-01-19
JPH0114536B2 true JPH0114536B2 (en, 2012) 1989-03-13

Family

ID=13826065

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8428180A Granted JPS5710202A (en) 1980-06-20 1980-06-20 Moisture detector

Country Status (1)

Country Link
JP (1) JPS5710202A (en, 2012)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112710700A (zh) * 2019-10-25 2021-04-27 梅斯法国公司 无机湿度传感器装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07111003B2 (ja) * 1985-03-11 1995-11-29 三菱レイヨン株式会社 熱交換器用中空糸

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5417075A (en) * 1977-07-07 1979-02-08 Matsushita Electric Ind Co Ltd Humidity detecting element

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112710700A (zh) * 2019-10-25 2021-04-27 梅斯法国公司 无机湿度传感器装置

Also Published As

Publication number Publication date
JPS5710202A (en) 1982-01-19

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