JPH01143121U - - Google Patents
Info
- Publication number
- JPH01143121U JPH01143121U JP3850288U JP3850288U JPH01143121U JP H01143121 U JPH01143121 U JP H01143121U JP 3850288 U JP3850288 U JP 3850288U JP 3850288 U JP3850288 U JP 3850288U JP H01143121 U JPH01143121 U JP H01143121U
- Authority
- JP
- Japan
- Prior art keywords
- resist
- semiconductor substrate
- coating device
- pattern
- depending
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 claims 1
- 238000004528 spin coating Methods 0.000 claims 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3850288U JPH01143121U (fi) | 1988-03-24 | 1988-03-24 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3850288U JPH01143121U (fi) | 1988-03-24 | 1988-03-24 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01143121U true JPH01143121U (fi) | 1989-10-02 |
Family
ID=31265046
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3850288U Pending JPH01143121U (fi) | 1988-03-24 | 1988-03-24 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01143121U (fi) |
-
1988
- 1988-03-24 JP JP3850288U patent/JPH01143121U/ja active Pending