JPH01163330U - - Google Patents
Info
- Publication number
- JPH01163330U JPH01163330U JP6044188U JP6044188U JPH01163330U JP H01163330 U JPH01163330 U JP H01163330U JP 6044188 U JP6044188 U JP 6044188U JP 6044188 U JP6044188 U JP 6044188U JP H01163330 U JPH01163330 U JP H01163330U
- Authority
- JP
- Japan
- Prior art keywords
- wafer edge
- removal device
- organic solvent
- resist removal
- resist
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003960 organic solvent Substances 0.000 claims 2
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 claims 1
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 claims 1
- 230000001681 protective effect Effects 0.000 claims 1
- 239000007921 spray Substances 0.000 claims 1
- 238000005507 spraying Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6044188U JPH01163330U (fi) | 1988-05-06 | 1988-05-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6044188U JPH01163330U (fi) | 1988-05-06 | 1988-05-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01163330U true JPH01163330U (fi) | 1989-11-14 |
Family
ID=31286146
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6044188U Pending JPH01163330U (fi) | 1988-05-06 | 1988-05-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01163330U (fi) |
-
1988
- 1988-05-06 JP JP6044188U patent/JPH01163330U/ja active Pending
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