JPH01142453U - - Google Patents
Info
- Publication number
- JPH01142453U JPH01142453U JP3739888U JP3739888U JPH01142453U JP H01142453 U JPH01142453 U JP H01142453U JP 3739888 U JP3739888 U JP 3739888U JP 3739888 U JP3739888 U JP 3739888U JP H01142453 U JPH01142453 U JP H01142453U
- Authority
- JP
- Japan
- Prior art keywords
- target
- substrate
- vacuum container
- insulated
- power source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 8
- 238000004544 sputter deposition Methods 0.000 claims 2
- 239000000126 substance Substances 0.000 claims 2
- 238000007740 vapor deposition Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000001000 micrograph Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3739888U JPH01142453U (ko) | 1988-03-22 | 1988-03-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3739888U JPH01142453U (ko) | 1988-03-22 | 1988-03-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01142453U true JPH01142453U (ko) | 1989-09-29 |
Family
ID=31263979
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3739888U Pending JPH01142453U (ko) | 1988-03-22 | 1988-03-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01142453U (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002356769A (ja) * | 2001-05-30 | 2002-12-13 | Matsushita Electric Ind Co Ltd | プラズマ処理方法及び装置 |
-
1988
- 1988-03-22 JP JP3739888U patent/JPH01142453U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002356769A (ja) * | 2001-05-30 | 2002-12-13 | Matsushita Electric Ind Co Ltd | プラズマ処理方法及び装置 |