JPH01140831U - - Google Patents

Info

Publication number
JPH01140831U
JPH01140831U JP3633388U JP3633388U JPH01140831U JP H01140831 U JPH01140831 U JP H01140831U JP 3633388 U JP3633388 U JP 3633388U JP 3633388 U JP3633388 U JP 3633388U JP H01140831 U JPH01140831 U JP H01140831U
Authority
JP
Japan
Prior art keywords
wafer
belt
transfer
fulcrum
transfers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3633388U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3633388U priority Critical patent/JPH01140831U/ja
Publication of JPH01140831U publication Critical patent/JPH01140831U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Delivering By Means Of Belts And Rollers (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
JP3633388U 1988-03-22 1988-03-22 Pending JPH01140831U (US07902200-20110308-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3633388U JPH01140831U (US07902200-20110308-C00004.png) 1988-03-22 1988-03-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3633388U JPH01140831U (US07902200-20110308-C00004.png) 1988-03-22 1988-03-22

Publications (1)

Publication Number Publication Date
JPH01140831U true JPH01140831U (US07902200-20110308-C00004.png) 1989-09-27

Family

ID=31262943

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3633388U Pending JPH01140831U (US07902200-20110308-C00004.png) 1988-03-22 1988-03-22

Country Status (1)

Country Link
JP (1) JPH01140831U (US07902200-20110308-C00004.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008126454A1 (ja) * 2007-04-11 2008-10-23 Ihi Corporation 基板搬送装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008126454A1 (ja) * 2007-04-11 2008-10-23 Ihi Corporation 基板搬送装置
JP2008260605A (ja) * 2007-04-11 2008-10-30 Ihi Corp 基板搬送装置

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