JPH01140819U - - Google Patents
Info
- Publication number
- JPH01140819U JPH01140819U JP3633688U JP3633688U JPH01140819U JP H01140819 U JPH01140819 U JP H01140819U JP 3633688 U JP3633688 U JP 3633688U JP 3633688 U JP3633688 U JP 3633688U JP H01140819 U JPH01140819 U JP H01140819U
- Authority
- JP
- Japan
- Prior art keywords
- processing chamber
- lamp house
- lamp
- light irradiation
- irradiation window
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000006837 decompression Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3633688U JPH0533004Y2 (cs) | 1988-03-22 | 1988-03-22 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3633688U JPH0533004Y2 (cs) | 1988-03-22 | 1988-03-22 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01140819U true JPH01140819U (cs) | 1989-09-27 |
JPH0533004Y2 JPH0533004Y2 (cs) | 1993-08-23 |
Family
ID=31262946
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3633688U Expired - Lifetime JPH0533004Y2 (cs) | 1988-03-22 | 1988-03-22 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0533004Y2 (cs) |
-
1988
- 1988-03-22 JP JP3633688U patent/JPH0533004Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0533004Y2 (cs) | 1993-08-23 |