JPH01140819U - - Google Patents

Info

Publication number
JPH01140819U
JPH01140819U JP3633688U JP3633688U JPH01140819U JP H01140819 U JPH01140819 U JP H01140819U JP 3633688 U JP3633688 U JP 3633688U JP 3633688 U JP3633688 U JP 3633688U JP H01140819 U JPH01140819 U JP H01140819U
Authority
JP
Japan
Prior art keywords
processing chamber
lamp house
lamp
light irradiation
irradiation window
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3633688U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0533004Y2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3633688U priority Critical patent/JPH0533004Y2/ja
Publication of JPH01140819U publication Critical patent/JPH01140819U/ja
Application granted granted Critical
Publication of JPH0533004Y2 publication Critical patent/JPH0533004Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP3633688U 1988-03-22 1988-03-22 Expired - Lifetime JPH0533004Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3633688U JPH0533004Y2 (cs) 1988-03-22 1988-03-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3633688U JPH0533004Y2 (cs) 1988-03-22 1988-03-22

Publications (2)

Publication Number Publication Date
JPH01140819U true JPH01140819U (cs) 1989-09-27
JPH0533004Y2 JPH0533004Y2 (cs) 1993-08-23

Family

ID=31262946

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3633688U Expired - Lifetime JPH0533004Y2 (cs) 1988-03-22 1988-03-22

Country Status (1)

Country Link
JP (1) JPH0533004Y2 (cs)

Also Published As

Publication number Publication date
JPH0533004Y2 (cs) 1993-08-23

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