JPH01140817U - - Google Patents
Info
- Publication number
- JPH01140817U JPH01140817U JP3784288U JP3784288U JPH01140817U JP H01140817 U JPH01140817 U JP H01140817U JP 3784288 U JP3784288 U JP 3784288U JP 3784288 U JP3784288 U JP 3784288U JP H01140817 U JPH01140817 U JP H01140817U
- Authority
- JP
- Japan
- Prior art keywords
- photomask
- foreign matter
- exposure apparatus
- inspection mechanism
- loading section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007689 inspection Methods 0.000 claims description 2
- 230000001681 protective effect Effects 0.000 claims 1
- 230000003287 optical effect Effects 0.000 description 3
- 238000005286 illumination Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3784288U JPH01140817U (he) | 1988-03-23 | 1988-03-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3784288U JPH01140817U (he) | 1988-03-23 | 1988-03-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01140817U true JPH01140817U (he) | 1989-09-27 |
Family
ID=31264416
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3784288U Pending JPH01140817U (he) | 1988-03-23 | 1988-03-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01140817U (he) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017021249A (ja) * | 2015-07-13 | 2017-01-26 | 株式会社東芝 | パーティクル測定用マスク |
-
1988
- 1988-03-23 JP JP3784288U patent/JPH01140817U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017021249A (ja) * | 2015-07-13 | 2017-01-26 | 株式会社東芝 | パーティクル測定用マスク |