JPH01140170U - - Google Patents
Info
- Publication number
- JPH01140170U JPH01140170U JP3646388U JP3646388U JPH01140170U JP H01140170 U JPH01140170 U JP H01140170U JP 3646388 U JP3646388 U JP 3646388U JP 3646388 U JP3646388 U JP 3646388U JP H01140170 U JPH01140170 U JP H01140170U
- Authority
- JP
- Japan
- Prior art keywords
- needle
- shaped
- needle tip
- probe card
- support portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000523 sample Substances 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図、第３図はこの考案の一実施例によるプ
ローブカードを示し、第１図は平面図、第３図は
斜視図、第２図はこの考案の他の実施例を示す平
面図、第４図は従来のプローブカードの平面図で
ある。
図において、１は針、２，２ａは針支持部、３
は基盤、４は半導体集積回路、５はドーナツ状針
支持部、６は半ドーナツ状針支持部を示す。なお
、図中同一符号は同一、または相当部分を示す。
1 and 3 show a probe card according to one embodiment of this invention, FIG. 1 is a plan view, FIG. 3 is a perspective view, and FIG. 2 is a plan view showing another embodiment of this invention. FIG. 4 is a plan view of a conventional probe card. In the figure, 1 is a needle, 2 and 2a are needle support parts, and 3
Reference numeral 4 indicates a substrate, 4 indicates a semiconductor integrated circuit, 5 indicates a donut-shaped needle support portion, and 6 indicates a semi-doughnut-shaped needle support portion. Note that the same reference numerals in the figures indicate the same or corresponding parts.
Claims (1)
距離のところにドーナツ状又は半ドーナツ状の針
を支持する部分を設けたことを特徴とするプロー
ブカード。 A probe card characterized in that a donut-shaped or half-doughnut-shaped needle supporting portion is provided at an equal distance from the needle tip between the needle support portion and the needle tip.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3646388U JPH01140170U (en) | 1988-03-18 | 1988-03-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3646388U JPH01140170U (en) | 1988-03-18 | 1988-03-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01140170U true JPH01140170U (en) | 1989-09-26 |
Family
ID=31263065
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3646388U Pending JPH01140170U (en) | 1988-03-18 | 1988-03-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01140170U (en) |
-
1988
- 1988-03-18 JP JP3646388U patent/JPH01140170U/ja active Pending