JPH0113894Y2 - - Google Patents
Info
- Publication number
- JPH0113894Y2 JPH0113894Y2 JP1981140789U JP14078981U JPH0113894Y2 JP H0113894 Y2 JPH0113894 Y2 JP H0113894Y2 JP 1981140789 U JP1981140789 U JP 1981140789U JP 14078981 U JP14078981 U JP 14078981U JP H0113894 Y2 JPH0113894 Y2 JP H0113894Y2
- Authority
- JP
- Japan
- Prior art keywords
- valve
- chamber
- diaphragm
- fluid passage
- valve seat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Fluid-Driven Valves (AREA)
- Fluid-Pressure Circuits (AREA)
- Exhaust-Gas Circulating Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14078981U JPS5845477U (ja) | 1981-09-21 | 1981-09-21 | 流体制御装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14078981U JPS5845477U (ja) | 1981-09-21 | 1981-09-21 | 流体制御装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5845477U JPS5845477U (ja) | 1983-03-26 |
| JPH0113894Y2 true JPH0113894Y2 (forum.php) | 1989-04-24 |
Family
ID=29933932
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14078981U Granted JPS5845477U (ja) | 1981-09-21 | 1981-09-21 | 流体制御装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5845477U (forum.php) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51109520A (ja) * | 1975-03-24 | 1976-09-28 | Hitachi Ltd | Kitaishindoben |
-
1981
- 1981-09-21 JP JP14078981U patent/JPS5845477U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5845477U (ja) | 1983-03-26 |