JPH01138607A - Thin film magnetic head - Google Patents
Thin film magnetic headInfo
- Publication number
- JPH01138607A JPH01138607A JP29656187A JP29656187A JPH01138607A JP H01138607 A JPH01138607 A JP H01138607A JP 29656187 A JP29656187 A JP 29656187A JP 29656187 A JP29656187 A JP 29656187A JP H01138607 A JPH01138607 A JP H01138607A
- Authority
- JP
- Japan
- Prior art keywords
- region
- thin film
- magnetic
- magnetic head
- pole piece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 title claims description 28
- 230000035699 permeability Effects 0.000 claims abstract description 25
- 239000000203 mixture Substances 0.000 claims description 13
- 230000005415 magnetization Effects 0.000 claims description 10
- 238000009792 diffusion process Methods 0.000 claims description 6
- 230000003247 decreasing effect Effects 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 14
- 239000010408 film Substances 0.000 description 13
- 239000000696 magnetic material Substances 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910000889 permalloy Inorganic materials 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000005347 demagnetization Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910001004 magnetic alloy Inorganic materials 0.000 description 1
- 239000006247 magnetic powder Substances 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 238000007781 pre-processing Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 229910000702 sendust Inorganic materials 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000002689 soil Substances 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
- G11B5/313—Disposition of layers
- G11B5/3143—Disposition of layers including additional layers for improving the electromagnetic transducing properties of the basic structure, e.g. for flux coupling, guiding or shielding
- G11B5/3146—Disposition of layers including additional layers for improving the electromagnetic transducing properties of the basic structure, e.g. for flux coupling, guiding or shielding magnetic layers
- G11B5/3153—Disposition of layers including additional layers for improving the electromagnetic transducing properties of the basic structure, e.g. for flux coupling, guiding or shielding magnetic layers including at least one magnetic thin film coupled by interfacing to the basic magnetic thin film structure
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Magnetic Heads (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明はリング型薄膜磁気ヘッドの新規な構成に関する
ものである。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a novel structure of a ring-type thin film magnetic head.
従来の技術
従来からのリング型薄膜磁気ヘッドの一般的な構造は、
第5図に示すようなものであり、下部磁性層1、上部磁
性層2、ギャップ3、薄膜コイル4、などによって構成
されている。Conventional technology The general structure of a conventional ring-type thin film magnetic head is as follows:
It is as shown in FIG. 5, and is composed of a lower magnetic layer 1, an upper magnetic layer 2, a gap 3, a thin film coil 4, and the like.
バルクヘッドと対比したときの、このような薄膜ヘッド
の特徴のひとつは、記録波長オーダのディメンションを
考えるとき、ポールピース厚5a、5bが有限長である
ことである。このような有限ボール長のヘッドでは、記
録媒体の走行する方向のヘッド磁界分布が、バルクヘッ
ドに比べてシャープになるために記録減磁が少なくなる
利点がある反面、周波数特性が波打つコンタ−効果が生
じたり、ポールピースの外側エツジ6a、6bが記録再
生感度を持って、再生信号に疑似パルスが生じるなどの
問題点もあることが知られている。One of the characteristics of such a thin film head when compared to a bulk head is that the pole piece thicknesses 5a and 5b have a finite length when considering dimensions on the order of recording wavelength. A head with such a finite ball length has the advantage that the head magnetic field distribution in the direction in which the recording medium runs is sharper than that of a bulk head, resulting in less recording demagnetization. It is known that there are problems such as the outer edges 6a and 6b of the pole piece have recording and reproducing sensitivity, and pseudo pulses are generated in the reproduced signal.
この様な問題を解決するために知られている方法のひと
つは、第6図の様に、ポールピースの外側のエツジライ
ン7a、7bにギャップラインと平行になる部分をなく
すことである。なお、同図はヘッドの記録媒体摺動面を
示している。こうすることによって、コンタ−効果は、
微小領域ごとに異なるコンタ−効果がトラック幅方向く
8〉で積分される結果として打ち消され、また疑似パル
スは、微小領域ごとに時間的に分散した微小パルスの集
合になることによって無視できるようになる。しかしな
がら、通常の薄膜技術では、薄膜の底面と上面が非平行
になるように形成するのは困難なため、何らかの前加工
、後加工が必要であり、製造プロセスが煩雑になる。One known method for solving this problem is to eliminate the portions of the outer edge lines 7a, 7b of the pole pieces that are parallel to the gap line, as shown in FIG. Note that this figure shows the recording medium sliding surface of the head. By doing this, the contour effect is
The contour effect, which differs for each minute area, is canceled out as a result of being integrated over 8〉 in the track width direction, and the spurious pulses can be ignored by becoming a collection of minute pulses that are temporally dispersed in each minute area. Become. However, with normal thin film technology, it is difficult to form a thin film so that the bottom and top surfaces are non-parallel, so some pre-processing and post-processing are required, which complicates the manufacturing process.
第7図はまた別の解決方法を示すものである。FIG. 7 shows yet another solution.
同図はヘッドのポールピース先端部近傍の部分断面図を
示している。ここでは、摺動面を図の様な形状に加工す
ることによって、ポールピースの磁性体が記録媒体9か
ら徐々に離れ、外側エツジ6a、6bの部分では凹部に
なって記録媒体9から完全に離れる様になっている。こ
れによって、コンタ−効果や疑似パルスの原因となる摺
動面上の磁性体の急竣な途切れがな(なる。しかしなが
ら、ポールピース厚が通常数ミクロン程度であることを
考えると、この様な加工自体容易ではなく、また使用土
凹邪に溜まる記録媒体の脱落磁性粉や、摺動面摩耗に伴
う凹部の消滅の間穎もある。This figure shows a partial sectional view of the vicinity of the tip of the pole piece of the head. Here, by processing the sliding surface into the shape shown in the figure, the magnetic material of the pole piece gradually separates from the recording medium 9, and the outer edges 6a and 6b become concave portions and are completely separated from the recording medium 9. They seem to be leaving. This eliminates abrupt discontinuities in the magnetic material on the sliding surface, which can cause contour effects and spurious pulses.However, considering that the pole piece thickness is usually about a few microns, such The processing itself is not easy, and there are also problems such as magnetic powder falling off from the recording medium that accumulates in the grooves of the used soil, and concavities disappearing due to wear on the sliding surfaces.
発明が解決しようとする問題点
このように薄膜磁気ヘッドでは、有限ボール長に起因す
るコンタ−効果や疑似パルスなどの問題があり、従来技
術ではこれらに効果的な解決を与えることができなかっ
た。Problems to be Solved by the Invention As described above, thin-film magnetic heads have problems such as contour effects and spurious pulses caused by the finite ball length, and conventional techniques have not been able to provide effective solutions to these problems. .
問題点を解決するための手段
本発明においては、ポールピースを、ギャップ対向面か
らポールピース厚み方向の一定深さまでの高透磁率を有
する第1の領域と、前記第1の領域に接し透磁率が連続
的に減少して前記ギャップ面の背面にまで至る第2の領
域によって構成する。Means for Solving the Problems In the present invention, a pole piece is provided with a first region having a high magnetic permeability from a surface facing the gap to a certain depth in the thickness direction of the pole piece, and a region in contact with the first region having a high magnetic permeability. It is constituted by a second region in which the distance decreases continuously and reaches the back surface of the gap surface.
作用
この様な構成によって、磁気ヘッド摺動面上で透磁率が
連続的に変化するようになり、磁性体の急竣な途切れが
なくなるので、コンタ−効果や疑似パルスなどの問題が
解消する。更に、第2の領域は第1の領域より半硬磁性
的(セミハード)になっているので、ここにトラック幅
方向に磁化容易軸を持つ磁気異方性を与えた場合、これ
は第1の領域に対する磁気バイアス手段の様に働き、第
1の領域のトラック幅方向の異方性が安定に保持され易
くなる、という極めて有用な副次効果も生じる。これに
よってトラック幅が狭い場合でも、第1の領域の異方性
は安定に保たれる様になり、高周波特性に優れた磁気ヘ
ッドが得られる。Operation: With this configuration, the magnetic permeability changes continuously on the sliding surface of the magnetic head, eliminating abrupt discontinuities in the magnetic material, thereby eliminating problems such as contour effects and spurious pulses. Furthermore, since the second region is more semi-hard magnetic than the first region, if magnetic anisotropy with an easy axis of magnetization in the track width direction is given here, this will be different from that of the first region. An extremely useful side effect is also produced that the anisotropy in the track width direction of the first region is easily maintained stably by acting like a magnetic biasing means for the region. As a result, even when the track width is narrow, the anisotropy of the first region can be maintained stably, and a magnetic head with excellent high frequency characteristics can be obtained.
実施例
第1図は、本発明の第1の実施例による薄膜磁気ヘッド
の先端部を示す断面図である。ここで、ギャップ3をは
さむポールピース1.2はそれぞれ、ギャップに接する
第1の領域1a、2a、および、その外側の第2の領域
1b、2bからなっている。ここで、第1の領域1a、
2aは高透磁率を有する部分であり、また第2の領域1
b、2bは、境界1cあるいは2cから外側に向けて連
続的に透磁率が低下するようになされている部分である
。理想的には、上記境界1c、2cにおいて第1の領・
域と第2の領域の透磁率は連続であリ、さらに第2の領
域の透磁率は少なくとも外側の境界位置1d、2dでは
、実質的に透磁率が1にまで低下しているのが望ましい
。Embodiment FIG. 1 is a sectional view showing the tip of a thin film magnetic head according to a first embodiment of the present invention. Here, each of the pole pieces 1.2 sandwiching the gap 3 consists of a first region 1a, 2a in contact with the gap, and a second region 1b, 2b outside the first region 1a, 2a. Here, the first region 1a,
2a is a portion having high magnetic permeability, and the second region 1
b and 2b are portions in which the magnetic permeability continuously decreases outward from the boundary 1c or 2c. Ideally, the first area and boundary 1c and 2c are
It is desirable that the magnetic permeability of the first region and the second region is continuous, and that the magnetic permeability of the second region is substantially reduced to 1 at least at the outer boundary positions 1d and 2d. .
さらに詳しくは、ポールピース1はセンダスト、パーマ
ロイ、あるいは非晶質磁性合金などの例えばスパッタ膜
によって、成膜方向11に従って形成されている。境界
1dから境界1cまでは組成比を変えながら、また境界
1cからギャップ面までは一定の高透磁率組成で成膜が
なされている。逆にポールピース2では、ギャップ面か
ら境界2cまでは一定組成で、また境界2cから2dま
では組成比を変えながら成膜されている。このようにす
るには、たとえば、成膜装置をマルチターゲット方式と
し、各ターゲットへの投入電力比が変化できるようにす
ればよい。当然、組成比は、透磁率が上記の様に変化す
るように変化させる。また、第1の領域と第2の領域は
成膜工程上連続しているのが望ましい。More specifically, the pole piece 1 is formed by, for example, a sputtered film of sendust, permalloy, or an amorphous magnetic alloy in a film forming direction 11. The film is formed while changing the composition ratio from the boundary 1d to the boundary 1c, and with a constant high magnetic permeability composition from the boundary 1c to the gap surface. Conversely, in the pole piece 2, the film is formed with a constant composition from the gap surface to the boundary 2c, and with a varying composition ratio from the boundary 2c to 2d. To do this, for example, the film forming apparatus may be of a multi-target type, and the ratio of power input to each target may be changed. Naturally, the composition ratio is changed so that the magnetic permeability changes as described above. Further, it is desirable that the first region and the second region are continuous in the film forming process.
以上のような薄膜磁気ヘッドの構成をとれば、ポールピ
ース部分はギャップ近傍から外側にむけて高透磁率部分
から非磁性部分まで連続して透磁率が変化する。したが
って、摺動面上の磁性体の急峻な途切れがなくなるから
、コンタ−効果や疑似パルスの問題を解消することがで
きる次に、同じく第1図を用いて、本発明の第2の実施
例の説明を行う。ここでは、第2の領域1b、2bの組
成は、第1の領域の組成(高透磁率組成)に別元素が添
加されたものとし、その添加比率を変えることによって
透磁率が変化させられている。たとえば、ポールピース
を第1実施例と同様の磁性膜によってスパッタ形成する
とき、境界1dで成膜が始まるときはスパッタガス(ア
ルゴン)中に酸素あるいは窒素などを生成膜が非磁性と
なる程度にまで混入し、その後順次混入程度を減じて、
境界1cから先は本来の高透磁率膜が成膜される様にす
る。その後の、ポールピース2の部分の成膜についても
同様である。With the structure of the thin film magnetic head as described above, the magnetic permeability of the pole piece portion changes continuously from the high magnetic permeability portion to the non-magnetic portion from the vicinity of the gap toward the outside. Therefore, since there is no sharp discontinuity in the magnetic material on the sliding surface, the problem of contour effects and spurious pulses can be solved.Next, using FIG. Explain. Here, the composition of the second regions 1b and 2b is assumed to be such that another element is added to the composition of the first region (high magnetic permeability composition), and the magnetic permeability is changed by changing the addition ratio. There is. For example, when forming the pole piece by sputtering with a magnetic film similar to that in the first embodiment, when film formation starts at the boundary 1d, oxygen or nitrogen is generated in the sputtering gas (argon) to the extent that the film becomes non-magnetic. After that, the degree of contamination is gradually reduced,
From the boundary 1c onwards, the original high magnetic permeability film is formed. The same applies to the subsequent film formation on the pole piece 2 portion.
第2図は本発明の第3の実施例を示す部分断面図である
。ここではポールピースの外側にさらに拡散層10(た
とえば金、Au、の薄膜)が設けられている。第2図の
各層を成膜後(ただしポールピース1.2は全厚にわた
って高透磁率膜)、遣切な熱処理を行うことにより、拡
散層10はポールピース1.2に拡散し、これによって
透磁率が連続的に変化した第2の領域1b、2bが形成
される。FIG. 2 is a partial sectional view showing a third embodiment of the present invention. Here, a diffusion layer 10 (for example, a thin film of gold or Au) is further provided on the outside of the pole piece. After forming each layer in FIG. 2 (pole piece 1.2 is a film with high magnetic permeability over the entire thickness), by performing extensive heat treatment, the diffusion layer 10 is diffused into pole piece 1.2, thereby making it permeable. Second regions 1b and 2b are formed in which the magnetic constant changes continuously.
第3図は本発明の第4の実施例を示すものである。ここ
では、ヘッド摺動面が示されている。ポールピースの第
1および第2の領域は、上記各実施例で示した様に形成
されるが、特に第2の領域1b、2bにはトラック幅方
向に磁化容易軸を持つ異方性が与えられている。図中、
矢印12は磁気異方性の方向を表す。ここで、低透磁率
である第2の領域は第1の領域より硬磁性的(セミハー
ド〉になっている部分を含んでいるので、ここにトラッ
ク幅方向の磁気異方性を与えた場合、これは第1の領域
に対する、いわば硬磁性膜による磁気バイアスの様に働
き、第1の領域のトラック幅方向の異方性が安定に保持
され易くなる。これによって、上記各実施例で説明した
本発明本来の効果に加えるに、第1の領域1a、2a(
すなわち、主要なヘッド磁路部分)の磁化状態を安定さ
せるのに大きな効果を持たせることが出来るのである。FIG. 3 shows a fourth embodiment of the invention. Here, the head sliding surface is shown. The first and second regions of the pole piece are formed as shown in each of the above embodiments, but in particular, the second regions 1b and 2b are given anisotropy with an axis of easy magnetization in the track width direction. It is being In the figure,
Arrow 12 represents the direction of magnetic anisotropy. Here, since the second region with low magnetic permeability includes a part that is more magnetically hard (semi-hard) than the first region, when magnetic anisotropy in the track width direction is given to this region, This acts like a magnetic bias applied by a hard magnetic film to the first region, making it easier to maintain stable anisotropy in the track width direction in the first region. In addition to the original effects of the present invention, the first regions 1a, 2a (
In other words, it can have a great effect on stabilizing the magnetization state of the main head magnetic path.
すでによ(知られたように、薄膜磁気ヘッドでは一般に
薄膜コア(ポールピース)にトラック幅方向に磁化容易
軸を持つ異方性を与え、これによって記録再生磁束の通
過方向が磁化困難軸となる様にし、高い高周波透磁率が
得られるようにしている。しかしながら、磁気記録の狭
トラツク化に伴って(ボール厚)/(トラック幅)の比
率が太き(なり、反磁界の点で、狭トラツクのポールピ
ースの磁化容易軸をトラック幅方向に保つのが困難にな
って(る。この様な状況に対し、この第4の実施例では
、トラック幅方向の異方性を有する第2の領域1b、2
bが、第一の領域1a、2aに隣接することによって第
一の領域のトラック幅方向の磁化がより安定して存在で
きるのである。As is already known, in thin-film magnetic heads, the thin-film core (pole piece) is generally given anisotropy with an axis of easy magnetization in the track width direction, so that the direction in which the recording and reproducing magnetic flux passes is the axis of hard magnetization. However, as magnetic recording tracks become narrower, the ratio of (ball thickness)/(track width) becomes thicker, resulting in a narrower magnetic field in terms of demagnetizing field. It becomes difficult to maintain the axis of easy magnetization of the pole piece of the track in the track width direction.In order to deal with this situation, in this fourth embodiment, a second magnet having anisotropy in the track width direction is used. Area 1b, 2
Since magnetization b is adjacent to the first regions 1a and 2a, the magnetization in the track width direction of the first region can exist more stably.
第4図は本発明の第5の実施例の薄膜ヘッドの摺動面を
示すものである。本実施例では基本的にはポールピース
の厚み方向の組成分布はな(、第2の領域1b、2bの
トラック幅方向に付与された磁気異方性の大きさが、ポ
ールピース背面に近付くほど大きくなるようになされて
いる。これによって、ヘッド磁路方向く紙面に垂直)の
透磁率がポールピース背面に近付くほど低下するように
なされている。また、第1の領域1a、2aには、高透
磁率の得られる比較的小さな異方性が与えられている。FIG. 4 shows a sliding surface of a thin film head according to a fifth embodiment of the present invention. In this example, the composition distribution in the thickness direction of the pole piece is basically the same (the magnitude of the magnetic anisotropy imparted in the track width direction of the second regions 1b and 2b increases as it approaches the back surface of the pole piece). As a result, the magnetic permeability in the head magnetic path direction (perpendicular to the plane of the paper) decreases as it approaches the back surface of the pole piece. Furthermore, the first regions 1a and 2a are given relatively small anisotropy that allows high magnetic permeability to be obtained.
図中、矢印12aの方向と大きさは磁気異方性の方向と
大きさを表す。実際に異方性の大きさを厚み方向に連続
に変えるには、たとえば、パーマロイの磁場中蒸着にお
いて、基板温度を連続的に変えるなどの方法がある。こ
の様な構成によっても、前記実施例と同様、コンタ−効
果や疑似パルスの問題のない薄膜ヘッドが得られる。ま
た狭トラツク時にも、強い異方性を持つ第2の領域の存
在によって、第1の領域の異方性をトラック幅方向に保
つのが容易になる。In the figure, the direction and magnitude of arrow 12a represent the direction and magnitude of magnetic anisotropy. To actually continuously change the magnitude of anisotropy in the thickness direction, for example, there is a method of continuously changing the substrate temperature in the deposition of permalloy in a magnetic field. With this configuration as well, a thin film head free from the problems of contour effects and spurious pulses can be obtained, similar to the embodiments described above. Furthermore, even during narrow tracks, the presence of the second region having strong anisotropy makes it easy to maintain the anisotropy of the first region in the track width direction.
発明の効果
本発明によれば、コンタ−効果や疑似パルスなどの問題
がな(、さらに、狭トラツク時でも、高周波特性を安定
に保持することが可能な薄膜磁気ヘッドを得ることがで
きる。Effects of the Invention According to the present invention, it is possible to obtain a thin film magnetic head that is free from problems such as contour effects and spurious pulses (and is capable of stably maintaining high frequency characteristics even during narrow tracks).
第1図〜第2図は本発明の第1〜第3の実施例を示す薄
膜磁気ヘッドの部分断面図、第3図〜第4図は本発明の
第4〜第5の実施例を示す薄膜磁気ヘッドの摺動面正面
図、第5図〜第7図は従来技術による薄膜磁気ヘッドを
説明する、それぞれ、断面図、正面図および部分断面図
である。
■・・・下部磁性層、2・・・上部磁性層、1a、2a
・・・第1の領域、1b、2b・・・第2の領域、3・
・・ギャップ、4・・・コイル、8・・・トラック幅方
向、9・・・磁気記録媒体、10・・・拡散層。
代理人の氏名 弁理士 中尾敏男 はか1名1−m−下
部磁性1(ズールC−ス)
第 2 図
1’、j 2
03 図
第4図
2a
第 5 口
第6図
第7図1 to 2 are partial cross-sectional views of thin film magnetic heads showing first to third embodiments of the present invention, and FIGS. 3 to 4 show fourth to fifth embodiments of the present invention. A front view of a sliding surface of a thin film magnetic head, and FIGS. 5 to 7 are a sectional view, a front view, and a partial sectional view, respectively, illustrating a thin film magnetic head according to the prior art. ■...Lower magnetic layer, 2...Upper magnetic layer, 1a, 2a
...first region, 1b, 2b...second region, 3.
... Gap, 4... Coil, 8... Track width direction, 9... Magnetic recording medium, 10... Diffusion layer. Name of agent Patent attorney Toshio Nakao 1 person 1-m-lower magnetism 1 (Zul C-S) 2nd figure 1', j 203 4th figure 2a 5th part 6th figure 7th figure
Claims (6)
ヘッドにおいて、前記ポールピースがギャップ対向面か
ら厚み方向一定深さまでの高透磁率を有する第1の領域
と、前記第1の領域に接し透磁率が連続的に減少する第
2の領域とからなることを特徴とする薄膜磁気ヘッド。(1) In a thin film magnetic head having a pole piece made of a magnetic thin film, the pole piece has a first region having high magnetic permeability from a surface facing the gap to a certain depth in the thickness direction, and a region in contact with the first region having high magnetic permeability. A thin film magnetic head comprising: a second region in which the magnetic field is continuously decreased;
組成比が連続的に変化していることを特徴とする特許請
求の範囲第1項に記載の薄膜磁気ヘッド。(2) The thin film magnetic head according to claim 1, wherein the second region has the same composition as the first region, and the composition ratio changes continuously.
添加したものであり、前記別成分の添加比率が連続的に
変化していることを特徴とする特許請求の範囲第1項に
記載の薄膜磁気ヘッド。(3) The composition of the second region is obtained by adding another component to the composition of the first region, and the addition ratio of the other component changes continuously. The thin film magnetic head according to item 1.
らに拡散層を有し、第2の領域の別成分は前記拡散層か
らの拡散成分であることを特徴とする特許請求の範囲第
3項に記載の薄膜磁気ヘッド。(4) The pole piece further has a diffusion layer adjacent to the back surface of the gap-opposed surface, and the other component in the second region is a diffusion component from the diffusion layer. The thin film magnetic head described in .
つ磁気異方性が与えられていることを特徴とする特許請
求の範囲第1項に記載の薄膜磁気ヘッド。(5) The thin film magnetic head according to claim 1, wherein the second region is provided with magnetic anisotropy having an axis of easy magnetization in the track width direction.
つ磁気異方性が与えられており、前記第2の領域の透磁
率は前記磁気異方性の大きさを変化させることによって
変化させられていることを特徴とする特許請求の範囲第
1項に記載の薄膜磁気ヘッド。(6) The second region is given magnetic anisotropy with an axis of easy magnetization in the track width direction, and the magnetic permeability of the second region can be changed by changing the magnitude of the magnetic anisotropy. The thin film magnetic head according to claim 1, characterized in that the thin film magnetic head is changed.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP29656187A JPH01138607A (en) | 1987-11-25 | 1987-11-25 | Thin film magnetic head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP29656187A JPH01138607A (en) | 1987-11-25 | 1987-11-25 | Thin film magnetic head |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01138607A true JPH01138607A (en) | 1989-05-31 |
Family
ID=17835137
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP29656187A Pending JPH01138607A (en) | 1987-11-25 | 1987-11-25 | Thin film magnetic head |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01138607A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5726840A (en) * | 1991-12-02 | 1998-03-10 | Matsushita Electric Industrial Co., Ltd. | Magnetic head apparatus having multiple recessed magnetic metal films |
-
1987
- 1987-11-25 JP JP29656187A patent/JPH01138607A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5726840A (en) * | 1991-12-02 | 1998-03-10 | Matsushita Electric Industrial Co., Ltd. | Magnetic head apparatus having multiple recessed magnetic metal films |
US5729412A (en) * | 1991-12-02 | 1998-03-17 | Matsushita Electric Industrial Co., Ltd. | Magnetic head including a recessed magnetic metal film |
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