JPH01138432A - 振動形差圧センサ - Google Patents

振動形差圧センサ

Info

Publication number
JPH01138432A
JPH01138432A JP29584087A JP29584087A JPH01138432A JP H01138432 A JPH01138432 A JP H01138432A JP 29584087 A JP29584087 A JP 29584087A JP 29584087 A JP29584087 A JP 29584087A JP H01138432 A JPH01138432 A JP H01138432A
Authority
JP
Japan
Prior art keywords
pressure
substrate
differential pressure
vibrating
base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP29584087A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0557532B2 (enrdf_load_html_response
Inventor
Kinji Harada
原田　謹爾
Kyoichi Ikeda
恭一 池田
Takashi Kobayashi
隆 小林
Tetsuya Watanabe
哲也 渡辺
Sunao Nishikawa
直 西川
Takashi Yoshida
隆司 吉田
Hideki Kuwayama
桑山　秀樹
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP29584087A priority Critical patent/JPH01138432A/ja
Publication of JPH01138432A publication Critical patent/JPH01138432A/ja
Publication of JPH0557532B2 publication Critical patent/JPH0557532B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP29584087A 1987-11-24 1987-11-24 振動形差圧センサ Granted JPH01138432A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29584087A JPH01138432A (ja) 1987-11-24 1987-11-24 振動形差圧センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29584087A JPH01138432A (ja) 1987-11-24 1987-11-24 振動形差圧センサ

Publications (2)

Publication Number Publication Date
JPH01138432A true JPH01138432A (ja) 1989-05-31
JPH0557532B2 JPH0557532B2 (enrdf_load_html_response) 1993-08-24

Family

ID=17825862

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29584087A Granted JPH01138432A (ja) 1987-11-24 1987-11-24 振動形差圧センサ

Country Status (1)

Country Link
JP (1) JPH01138432A (enrdf_load_html_response)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60186725A (ja) * 1984-03-06 1985-09-24 Yokogawa Hokushin Electric Corp 圧力センサ

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60186725A (ja) * 1984-03-06 1985-09-24 Yokogawa Hokushin Electric Corp 圧力センサ

Also Published As

Publication number Publication date
JPH0557532B2 (enrdf_load_html_response) 1993-08-24

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees