JPH01137535U - - Google Patents
Info
- Publication number
- JPH01137535U JPH01137535U JP3257588U JP3257588U JPH01137535U JP H01137535 U JPH01137535 U JP H01137535U JP 3257588 U JP3257588 U JP 3257588U JP 3257588 U JP3257588 U JP 3257588U JP H01137535 U JPH01137535 U JP H01137535U
- Authority
- JP
- Japan
- Prior art keywords
- wafer mounting
- vacuum chamber
- wafer
- pressure
- reducing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3257588U JPH01137535U (enExample) | 1988-03-14 | 1988-03-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3257588U JPH01137535U (enExample) | 1988-03-14 | 1988-03-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01137535U true JPH01137535U (enExample) | 1989-09-20 |
Family
ID=31259123
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3257588U Pending JPH01137535U (enExample) | 1988-03-14 | 1988-03-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01137535U (enExample) |
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1988
- 1988-03-14 JP JP3257588U patent/JPH01137535U/ja active Pending